Patents by Inventor Robert Martin Higgins

Robert Martin Higgins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12199091
    Abstract: A method of manufacturing an electronic device includes forming a shallow trench isolation (STI) structure on or in a semiconductor surface layer and forming a mask on the semiconductor surface layer, where the mask exposes a surface of a dielectric material of the STI structure and a prospective local oxidation of silicon (LOCOS) portion of a surface of the semiconductor surface layer. The method also includes performing an oxidation process using the mask to oxidize silicon in an indent in the dielectric material of the STI structure and to grow an oxide material on the exposed LOCOS portion of the surface of the semiconductor surface layer.
    Type: Grant
    Filed: October 18, 2021
    Date of Patent: January 14, 2025
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Robert Martin Higgins, Xiaoju Wu, Li Wang, Venugopal Balakrishna Menon
  • Patent number: 12159846
    Abstract: A method of forming a semiconductor device for improving an electrical connection. The semiconductor device includes a top metal layer. A protective dielectric layer is formed over the top metal layer. A sintering operation is performed while the top metal layer is covered by the protective dielectric layer. After the sintering operation, the protective dielectric layer is patterned to expose areas on the top metal layer for bond pads of the semiconductor device. A bond pad cap is formed on the top metal layer where exposed by the protective dielectric layer.
    Type: Grant
    Filed: December 9, 2019
    Date of Patent: December 3, 2024
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Richard Allen Faust, Robert Martin Higgins, Anagha Shashishekhar Kulkarni, Jonathan Philip Davis, Sudtida Lavangkul, Andrew Frank Burnett
  • Publication number: 20240312984
    Abstract: Apparatus, and their methods of manufacture, that include an insulating feature above a substrate and a resistor formed on the insulating feature. Forming the resistor includes depositing polysilicon and doping the polysilicon (e.g., in-situ) with a carbon dopant and/or an oxygen dopant.
    Type: Application
    Filed: May 29, 2024
    Publication date: September 19, 2024
    Inventors: Yanbiao Pan, Robert Martin Higgins, Bhaskar Srinivasan, Pushpa Mahalingam
  • Patent number: 12027515
    Abstract: Apparatus, and their methods of manufacture, that include an insulating feature above a substrate and a resistor formed on the insulating feature. Forming the resistor includes depositing polysilicon and doping the polysilicon (e.g., in-situ) with a carbon dopant and/or an oxygen dopant.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: July 2, 2024
    Assignee: Texas Instruments Incorporated
    Inventors: Yanbiao Pan, Robert Martin Higgins, Bhaskar Srinivasan, Pushpa Mahalingam
  • Patent number: 11817454
    Abstract: Described examples include a resistor having a substrate having a non-conductive surface and a patterned polysilicon layer on the non-conductive surface, the patterned polysilicon layer including polycrystalline silicon wherein at least 90% of the grains in the polycrystalline silicon are 30 nm or smaller. The resistor also has a first terminal in conductive contact with the patterned polysilicon layer and a second terminal in conductive contact with the polysilicon layer and spaced from the first contact.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: November 14, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Yanbiao Pan, Robert Martin Higgins, Bhaskar Srinivasan, Pushpa Mahalingam
  • Publication number: 20230112644
    Abstract: Apparatus, and their methods of manufacture, that include an insulating feature above a substrate and a resistor formed on the insulating feature. Forming the resistor includes depositing polysilicon and doping the polysilicon (e.g., in-situ) with a carbon dopant and/or an oxygen dopant.
    Type: Application
    Filed: September 30, 2021
    Publication date: April 13, 2023
    Inventors: Yanbiao Pan, Robert Martin Higgins, Bhaskar Srinivasan, Pushpa Mahalingam
  • Publication number: 20220367444
    Abstract: A method of manufacturing an electronic device includes forming a shallow trench isolation (STI) structure on or in a semiconductor surface layer and forming a mask on the semiconductor surface layer, where the mask exposes a surface of a dielectric material of the STI structure and a prospective local oxidation of silicon (LOCOS) portion of a surface of the semiconductor surface layer. The method also includes performing an oxidation process using the mask to oxidize silicon in an indent in the dielectric material of the STI structure and to grow an oxide material on the exposed LOCOS portion of the surface of the semiconductor surface layer.
    Type: Application
    Filed: October 18, 2021
    Publication date: November 17, 2022
    Inventors: Robert Martin Higgins, Xiaoju Wu, Li Wang, Venugopal Balakrishna Menon
  • Publication number: 20220238516
    Abstract: Described examples include a resistor having a substrate having a non-conductive surface and a patterned polysilicon layer on the non-conductive surface, the patterned polysilicon layer including polycrystalline silicon wherein at least 90% of the grains in the polycrystalline silicon are 30 nm or smaller. The resistor also has a first terminal in conductive contact with the patterned polysilicon layer and a second terminal in conductive contact with the polysilicon layer and spaced from the first contact.
    Type: Application
    Filed: August 31, 2021
    Publication date: July 28, 2022
    Inventors: Yanbiao Pan, Robert Martin Higgins, Pushpa Mahalingam, Bhaskar Srinivasan
  • Publication number: 20210005560
    Abstract: A method of forming a semiconductor device for improving an electrical connection. The semiconductor device includes a top metal layer. A protective dielectric layer is formed over the top metal layer. A sintering operation is performed while the top metal layer is covered by the protective dielectric layer. After the sintering operation, the protective dielectric layer is patterned to expose areas on the top metal layer for bond pads of the semiconductor device. A bond pad cap is formed on the top metal layer where exposed by the protective dielectric layer.
    Type: Application
    Filed: December 9, 2019
    Publication date: January 7, 2021
    Applicant: Texas Instruments Incorporated
    Inventors: Richard Allen Faust, Robert Martin Higgins, Anagha Shashishekhar Kulkarni, Jonathan Philip Davis, Sudtida Lavangkul, Andrew Frank Burnett