Patents by Inventor Robert Mattox

Robert Mattox has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a dielectric filled trench
    Patent number: 4960727
    Abstract: A structure and method for forming an isolation wall in an etched trench are described. The trench walls are covered by a thin silicon oxide layer and the trench conformally filled with an oxy-nitride mixture having a particular range of composition so as to produce a neutral to slight tensile stress in the oxy-nitride relative to silicon. The structure is very simple to fabricate and creates fewer defects in the silicon substrate than prior art techniques. Buried voids in the filled trench are eliminated.
    Type: Grant
    Filed: November 18, 1988
    Date of Patent: October 2, 1990
    Assignee: Motorola, Inc.
    Inventors: Robert Mattox, Steven Fong
  • Trench isolation process and structure
    Patent number: 4825277
    Abstract: A structure and method for forming an isolation wall in an etched trench are described. The trench walls are covered by a thin silicon oxide layer and the trench conformally filled with an oxy-nitride mixture having a particular range of composition so as to produce a neutral to slight tensile stress in the oxy-nitride relative to silicon. The structure is very simple to fabricate and creates fewer defects in the silicon substrate than prior art techniques. Buried voids in the filled trench are eliminated.
    Type: Grant
    Filed: November 17, 1987
    Date of Patent: April 25, 1989
    Assignee: Motorola Inc.
    Inventors: Robert Mattox, Steven Fong