Abstract: An approach is provided for registering specific content in a portable storage medium to a digital locker. The portable storage medium is configured to include a content access application which causes the user interface to display a content access and registration part on a terminal executing the content access application, to request user entry of access validation information associated with the specific content. Upon access validation, the specific content can be registered to the digital locker of the user.

Abstract: An approach is provided for registering specific content in a portable storage medium to a digital locker. The portable storage medium is configured to include a content access application which causes the user interface to display a content access and registration part on a terminal executing the content access application, to request user entry of access validation information associated with the specific content. Upon access validation, the specific content can be registered to the digital locker of the user.

Abstract: A processing chamber for post-wet-etch removing of drying fluid (DF) is disclosed. The chamber includes a chamber wall surrounding a processing volume and a plurality of nozzles disposed annularly about the processing volume and arranged into a set of nozzle rows that includes at least one nozzle row. The chamber also includes a plenum and a set of manifolds coupled to the plurality of nozzles to deliver the supercritical CO2 to the plurality of nozzles. Each nozzle has a nozzle outlet directed toward an interior portion of the processing volume and the nozzles are configured to flow the supercritical CO2 toward the substrates in a manner that minimizes recirculation loops and vortices.

Abstract: A processing chamber for post-wet-etch removing of drying fluid (DF) is disclosed. The chamber includes a chamber wall surrounding a processing volume and a plurality of nozzles disposed annularly about the processing volume and arranged into a set of nozzle rows that includes at least one nozzle row. The chamber also includes a plenum and a set of manifolds coupled to the plurality of nozzles to deliver the supercritical CO2 to the plurality of nozzles. Each nozzle has a nozzle outlet directed toward an interior portion of the processing volume and the nozzles are configured to flow the supercritical CO2 toward the substrates in a manner that minimizes recirculation loops and vortices.

Abstract: A multi-speed slit valve apparatus and method of actuating a slit valve apparatus at least at two distinct speeds is provided. The slit valve apparatus includes a pneumatic cylinder 210 having a primary channel 254, 266 and auxiliary channel 258, 270 at each end, wherein the auxiliary channels 258, 270 have a cross sectional area smaller than that of the primary channels 254, 266. A piston 226 defining a front volume 240 and a back volume 242 is disposed in the cylinder 210 and is reciprocally actuated by a compressed fluid such as air. At a predetermined stage during the cylinder's out-stroke and in-stroke the primary channels 254, 266 become sealed from the front and back volumes 240, 242, respectively, such that during the remainder of the stroke the fluid is biased to exhaust through the auxiliary channels 258, 270.