Abstract: Integrated circuit (IC) device isolation structures between transistor gates. An IC device may include an electrically insulating structure between metal gates of adjacent transistors, and the insulating structure may include a dielectric liner around a different dielectric fill material and on sidewalls of the adjacent metal gates. The dielectric liner may be much thinner than the dielectric fill material. A metal via may be through, and in contact with, the dielectric fill material. The adjacent transistors and metal gates may be between frontside and backside interconnect structures, and the metal via may extend between, and couple, the interconnect structures.

Abstract: A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The plurality of platens may also be capable of rotation. The central hub also controls the rotation of each of the platens about an axis orthogonal to the rotation axis of the central hub. In this way, variable angle implants may be performed. Additionally, this allows the workpieces to be mounted while in a horizontal orientation.

Abstract: The present invention relates to a distribution device for an extruder, comprising at least two conduits leading away from a distribution unit, each conduit having a temperature-control device. The present invention further relates to an extrusion system comprising a distribution device of the above kind and to a method for producing a proteinaceous food item by means of the extrusion system.

Abstract: A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The plurality of platens may also be capable of rotation. The central hub also controls the rotation of each of the platens about an axis orthogonal to the rotation axis of the central hub. In this way, variable angle implants may be performed. Additionally, this allows the workpieces to be mounted while in a horizontal orientation.

Abstract: A system and method for controlling electrostatic clamping of multiple platens on a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on a spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The central hub provides the electrostatic clamping voltages to each of the plurality of platens. Further, the plurality of platens may also be capable of rotation about an axis orthogonal to the rotation axis of the central hub. The central hub controls the rotation of each of the platens. Power connections and communications are provided to the central hub via the spindle assembly.

Abstract: A system and method for controlling electrostatic clamping of multiple platens on a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on a spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The central hub provides the electrostatic clamping voltages to each of the plurality of platens. Further, the plurality of platens may also be capable of rotation about an axis orthogonal to the rotation axis of the central hub. The central hub controls the rotation of each of the platens. Power connections and communications are provided to the central hub via the spindle assembly.

Abstract: Methods and systems for reducing the temperature of the charge air provided to a turbocharged internal combustion engine. A supercharger is installed on the air intake path, upstream the turbocharger's compressor. A secondary charge air cooler is installed between the supercharger and the main compressor. This over-compresses the intake air, so that an expansion turbine installed downstream the turbocharger's compressor can cool the charge air and still provide sufficient charge air pressure into the intake manifold.

Abstract: Methods and systems for reducing the temperature of the charge air provided to a turbocharged internal combustion engine. A supercharger is installed on the air intake path, upstream the turbocharger's compressor. A secondary charge air cooler is installed between the supercharger and the main compressor. This over-compresses the intake air, so that an expansion turbine installed downstream the turbocharger's compressor can cool the charge air and still provide sufficient charge air pressure into the intake manifold.

Abstract: Embodiments of the present disclosure relate to a rotatable electrostatic chuck. In some embodiments, a rotatable electrostatic chuck includes a dielectric disk having at least one chucking electrode and a plurality of coolant channels; a cryogenic manifold coupled to the dielectric disk and having a coolant inlet and a coolant outlet both of which are fluidly coupled to the plurality of coolant channels; a shaft assembly coupled to the cryogenic manifold; a cryogenic supply chamber coupled to the shaft assembly; a supply tube coupled to the cryogenic supply chamber and to the coolant inlet to supply the cryogenic medium to the plurality of coolant channels, wherein the supply tube extends through the central opening of the shaft assembly; and a return tube coupled to the coolant outlet and to the cryogenic supply chamber, wherein the supply tube is disposed within the return tube.

Abstract: A rotary union that includes a heated ferrofluid seal is disclosed. The rotary union includes an inner rotating shaft, an intermediate rotating shaft and an outer rotating shaft. The inner rotating shaft is hollow to allow the flow of cryogenic fluid in one direction. The inner rotating shaft and the intermediate shaft are spaced apart to create a channel for the return of the cryogenic fluid. The intermediate rotating shaft is separated from the outer rotating shaft by a gap so as to reduce thermal conductivity. In this way, the temperature of the outer rotating shaft is greater than the temperature of the cryogenic fluid. A heated ferrofluid seal is disposed between the outer rotating shaft and the housing.

Abstract: An apparatus determining network health comprising base stations in bidirectional communication with radios, each having an identifier and transmitting a signal including the identifier. First and second health determining devices each receive the signal during normal over-the-air operation of radio and determine if the radio is authorized and, if so, determine the identifier, time-separated signal waveforms that are compared, operating characteristics from the compared waveforms, and a current location of the radio. Each of the devices determine health of the radio based on packet sniffing, a frequency deviation, or a range of deviations by analyzing the operating characteristics. After analysis results sent to the master controller from the devices indicate that the authorized radio is healthy, the master controller determines from the analysis results that a geographically unhealthy location of the network exists within the geographic area from which the authorized healthy radio transmitted the signal.

Abstract: Various embodiments of wafer processing systems including batch load lock apparatus with temperature control capability are disclosed. The batch load lock apparatus includes a load lock body including first and second load lock openings, a lift assembly within the load lock body, the lift assembly including multiple wafer stations, each of the multiple wafer stations adapted to provide access to wafers through the first and second load lock openings, wherein the batch load lock apparatus includes temperature control capability (e.g., heating or cooling). Batch load lock apparatus is capable of transferring batches of wafers into and out of various processing chambers. Methods of operating the batch load lock apparatus are also provided, as are numerous other aspects.

Abstract: A rotary union that includes a heated ferrofluid seal is disclosed. The rotary union includes an inner rotating shaft, an intermediate rotating shaft and an outer rotating shaft. The inner rotating shaft is hollow to allow the flow of cryogenic fluid in one direction. The inner rotating shaft and the intermediate shaft are spaced apart to create a channel for the return of the cryogenic fluid. The intermediate rotating shaft is separated from the outer rotating shaft by a gap so as to reduce thermal conductivity. In this way, the temperature of the outer rotating shaft is greater than the temperature of the cryogenic fluid. A heated ferrofluid seal is disposed between the outer rotating shaft and the housing.

Abstract: Various embodiments of wafer processing systems including batch load lock apparatus with temperature control capability are disclosed. The batch load lock apparatus includes a load lock body including first and second load lock openings, a lift assembly within the load lock body, the lift assembly including multiple wafer stations, each of the multiple wafer stations adapted to provide access to wafers through the first and second load lock openings, wherein the batch load lock apparatus includes temperature control capability (e.g., heating or cooling). Batch load lock apparatus is capable of transferring batches of wafers into and out of various processing chambers. Methods of operating the batch load lock apparatus are also provided, as are numerous other aspects.

Abstract: Embodiments of the present disclosure relate to a rotatable electrostatic chuck. In some embodiments, a rotatable electrostatic chuck includes a dielectric disk having at least one chucking electrode and a plurality of coolant channels; a cryogenic manifold coupled to the dielectric disk and having a coolant inlet and a coolant outlet both of which are fluidly coupled to the plurality of coolant channels; a shaft assembly coupled to the cryogenic manifold; a cryogenic supply chamber coupled to the shaft assembly; a supply tube coupled to the cryogenic supply chamber and to the coolant inlet to supply the cryogenic medium to the plurality of coolant channels, wherein the supply tube extends through the central opening of the shaft assembly; and a return tube coupled to the coolant outlet and to the cryogenic supply chamber, wherein the supply tube is disposed within the return tube.

Abstract: An apparatus determining network health comprising base stations in bidirectional communication with radios, each having an identifier and transmitting a signal including the identifier. First and second health determining devices each receive the signal during normal over-the-air operation of radio and determine if the radio is authorized and, if so, determine the identifier, time-separated signal waveforms that are compared, operating characteristics from the compared waveforms, and a current location of the radio. Each of the devices determine health of the radio based on packet sniffing, a frequency deviation, or a range of deviations by analyzing the operating characteristics. After analysis results sent to the master controller from the devices indicate that the authorized radio is healthy, the master controller determines from the analysis results that a geographically unhealthy location of the network exists within the geographic area from which the authorized healthy radio transmitted the signal.

Abstract: Embodiments of the invention provide methods and systems for caching data. One method includes receiving, through a user device, a selection of a set of data items, and determining, with an electronic processor, a storage rate, wherein the storage rate includes an integer (N). The method also include retrieving the set of data items and storing every Nth data item included in the set of data items to a non-transitory memory cache while discarding intervening data items.

Abstract: Various embodiments of wafer processing systems including batch load lock apparatus with temperature control capability are disclosed. The batch load lock apparatus includes a load lock body including first and second load lock openings, a lift assembly within the load lock body, the lift assembly including multiple wafer stations, each of the multiple wafer stations adapted to provide access to wafers through the first and second load lock openings, wherein the batch load lock apparatus includes temperature control capability (e.g., heating or cooling). Batch load lock apparatus is capable of transferring batches of wafers into and out of various processing chambers. Methods of operating the batch load lock apparatus are also provided, as are numerous other aspects.

Abstract: An apparatus determining network health comprising base stations in bidirectional communication with radios, each having an identifier and transmitting a signal including the identifier. First and second health determining devices each receive the signal during normal over-the-air operation of radio and determine if the radio is authorized and, if so, determine the identifier, time-separated signal waveforms that are compared, operating characteristics from the compared waveforms, and a current location of the radio. Each of the devices determine health of the radio based on packet sniffing, a frequency deviation, or a range of deviations by analyzing the operating characteristics. After analysis results sent to the master controller from the devices indicate that the authorized radio is healthy, the master controller determines from the analysis results that a geographically unhealthy location of the network exists within the geographic area from which the authorized healthy radio transmitted the signal.

Abstract: A system and method of treating a fluid to be used for hydraulic fracturing adds an effective amount of chlorine dioxide to the fluid to act as a biocide that kills harmful bacteria. A system for adding chlorine dioxide to the fluid can continuously add chlorine dioxide to an incoming flow of the fluid to produce a continuous flow of treated fluid.