Patents by Inventor Robert Mossel
Robert Mossel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11431340Abstract: This disclosure relates to a dual power supply detection circuit including first and second input stage field effect transistors, an inverter stage, a feedback stage field effect transistor, and first and second compensation circuits. The inverter stage includes a complimentary pair of transistors, and the complementary pair of transistors includes an NMOS transistor and a PMOS transistor configured and arranged so that gate lengths of the PMOS and NMOS transistors are different. The disclosure also relates to an integrated circuit including a dual power supply detection circuit.Type: GrantFiled: January 6, 2021Date of Patent: August 30, 2022Assignee: Nexperia B.V.Inventors: Geethanadh Asam, Robert Mossel, Walter Luis Tercariol
-
Publication number: 20210250027Abstract: This disclosure relates to a dual power supply detection circuit including first and second input stage field effect transistors, an inverter stage, a feedback stage field effect transistor, and first and second compensation circuits. The inverter stage includes a complimentary pair of transistors, and the complementary pair of transistors includes an NMOS transistor and a PMOS transistor configured and arranged so that gate lengths of the PMOS and NMOS transistors are different. The disclosure also relates to an integrated circuit including a dual power supply detection circuit.Type: ApplicationFiled: January 6, 2021Publication date: August 12, 2021Applicant: NEXPERIA B.V.Inventors: Geethanadh ASAM, Robert MOSSEL, Walter Luis TERCARIOL
-
Patent number: 9644995Abstract: A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit (70) having a first input terminal (72) connected to the current source and an output terminal (74) for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals (75, 76) arranged to receive one or more voltages from a power supply (77a, 77b) for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.Type: GrantFiled: July 2, 2012Date of Patent: May 9, 2017Assignee: MAPPER LITHOGRAPHY IP B.V.Inventors: Cor Verburg, Robert Mossel, Kaustubh Prabodh Padhye, Eric de Kok, Willem Jacob Vis
-
Patent number: 9400195Abstract: A capacitive measurement system for generating a measurement signal representative of a measured position or distance to a target.Type: GrantFiled: July 2, 2012Date of Patent: July 26, 2016Assignee: MAPPER LITHOGRAPHY IP B.V.Inventors: Cor Verburg, Robert Mossel, Kaustubh Prabodh Padhye, Eric de Kok, Willem Jacob Vis
-
Patent number: 8841920Abstract: The invention relates to a lithography system. The lithography system has a projection lens system and a capacitive sensing system. The projection lens system is provided with a final projection lens. The capacitive sensing system is arranged for making a measurement related to a distance between the final projection lens and a target. The capacitive sensing system includes at least one capacitive sensor. Additional, the capacitive sensing system is provided with a flexible printed circuit structure and at least one integrated flex print connector. The at least one sensor is located in the flexible printed circuit structure. The flexible printed circuit structure has a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks. The conductive tracks extend from the electrodes along the at least one integrated flex print connector.Type: GrantFiled: October 28, 2013Date of Patent: September 23, 2014Assignee: Mapper Lithography IP B.V.Inventors: Guido De Boer, Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink
-
Publication number: 20140049276Abstract: The invention relates to a lithography system. The lithography system has a projection lens system and a capacitive sensing system. The projection lens system is provided with a final projection lens. The capacitive sensing system is arranged for making a measurement related to a distance between the final projection lens and a target. The capacitive sensing system includes at least one capacitive sensor. Additional, the capacitive sensing system is provided with a flexible printed circuit structure and at least one integrated flex print connector. The at least one sensor is located in the flexible printed circuit structure. The flexible printed circuit structure has a flexible base provided with conductive electrodes for the at least one sensor and conductive tracks. The conductive tracks extend from the electrodes along the at least one integrated flex print connector.Type: ApplicationFiled: October 28, 2013Publication date: February 20, 2014Applicant: MAPPER LITHOGRAPHY IP B.V.Inventors: Guido DE BOER, Johnny Joannes Jacobus VAN BAAR, Kaustubh Prabodh PADHYE, Robert MOSSEL, Niels VERGEER, Stijn Willem Herman Karel STEENBRINK
-
Patent number: 8638109Abstract: A capacitive sensing system having two or more capacitive sensors, one or more AC power sources for energizing the capacitive sensors, and a signal processing circuit for processing signals from the sensors. The sensors are arranged in pairs, wherein the one or more AC power sources are arranged to energize a first sensor of a pair of the sensors with an alternating current or voltage 180 degrees out of phase to a current or voltage for a second sensor of the pair of sensors, and wherein a pair of the sensors provides a measuring unit for a single measured distance value, the signal processing circuit receiving an output signal from each sensor of the pair and generating a measured value related to the average distance between the sensors of the pair and the target.Type: GrantFiled: December 23, 2010Date of Patent: January 28, 2014Assignee: Mapper Lithography IP B.V.Inventors: Guido De Boer, Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink
-
Patent number: 8570055Abstract: A capacitive sensing system with a sensor having a thin film structure. The thin film structure includes a first insulating layer and a first conductive film having a sensing electrode formed on a first surface of the first insulating layer and a second conductive film having a back guard electrode. The back guard electrode is formed in a single plane and has a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.Type: GrantFiled: December 23, 2010Date of Patent: October 29, 2013Assignee: Mapper Lithography IP B.V.Inventors: Guido De Boer, Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink
-
Patent number: 8513959Abstract: An integrated sensory system for a lithography machine with a projection lens system (132) for focusing one or more exposure beams onto a target, a moveable table (134) for carrying the target (9), a capacitive sensing system (300) for making a measurement related to a distance between a final focusing element of the projection lens system (104) and a surface of a target (9), and a control unit (400) for controlling movement of the moveable table (134) to adjust a position of the target (9) based at least in part on a signal from the capacitive sensing system. The capacitive sensing system (300) has a plurality of capacitive sensors (30), each having a thin film structure. The capacitive sensors and the final focusing element (104) of the projection lens system are mounted directly to a common base (112), and the sensors are located in close proximity to an edge of the final focusing element of the projection lens system.Type: GrantFiled: December 23, 2010Date of Patent: August 20, 2013Assignee: Mapper Lithography IP B.V.Inventors: Guido De Boer, Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink
-
Publication number: 20130009626Abstract: A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit (70) having a first input terminal (72) connected to the current source and an output terminal (74) for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals (75, 76) arranged to receive one or more voltages from a power supply (77a, 77b) for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.Type: ApplicationFiled: July 2, 2012Publication date: January 10, 2013Applicant: MAPPER LITHOGRAPHY IP B.V.Inventors: Cor VERBURG, Robert MOSSEL, Kaustubh Prabodh PADHYE, Eric de KOK, Wim VIS
-
Publication number: 20130003034Abstract: A capacitive measurement system for generating a measurement signal representative of a measured position or distance to a target.Type: ApplicationFiled: July 2, 2012Publication date: January 3, 2013Applicant: MAPPER LITHOGRAPHY IP B.V.Inventors: COR VERBURG, ROBERT MOSSEL, KAUSTUBH PRABODH PADHYE, ERIC DE KOK, WIM VIS
-
Publication number: 20110261344Abstract: A method for exposing a surface of a target in a system comprising a set of sensors (30) for measuring distance to the target. The method comprises clamping the target to a moveable table (134), moving the target to a plurality of positions in which one or more of the sensors are positioned above the target, receiving signals from one or more of the sensors positioned above the target, calculating one or more tilt correction values (Rx, Ry) based on the signals received from the sensors, adjusting the tilt of the table based on the one or more tilt correction values, and exposing the target.Type: ApplicationFiled: December 23, 2010Publication date: October 27, 2011Applicant: Mapper Lithography IP B.V.Inventors: Guido DE BOER, Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink, Johan Joost Koning
-
Publication number: 20110254565Abstract: A capacitive sensing system comprising two or more capacitive sensors, one or more AC power sources for energizing the capacitive sensors, and a signal processing circuit for processing signals from the sensors. The sensors are arranged in pairs, wherein the one or more AC power sources are arranged to energize a first sensor of a pair of the sensors with an alternating current or voltage 180 degrees out of phase to a current or voltage for a second sensor of the pair of sensors, and wherein a pair of the sensors provides a measuring unit for a single measured distance value, the signal processing circuit receiving an output signal from each sensor of the pair and generating a measured value related to the average distance between the sensors of the pair and the target.Type: ApplicationFiled: December 23, 2010Publication date: October 20, 2011Applicant: Mapper Lithography IP B.V.Inventors: Guido De Boer, Johnny Johannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink
-
Publication number: 20110193573Abstract: An integrated sensor system for a lithography machine, the system comprising a projection lens system (132) for focusing one or more exposure beams onto a target, a moveable table (134) for carrying the target (9), a capacitive sensing system (300) for making a measurement related to a distance between a final focusing element of the projection lens system (104) and a surface of the target (9), and a control unit (400) for controlling movement of the moveable table (134) to adjust a position of the target (9) based at least in part on a signal from the capacitive sensing system. The capacitive sensing system (300) comprises a plurality of capacitive sensors (30), each comprising a thin film structure. The capacitive sensors and the final focusing element (104) of the projection lens system are mounted directly to a common base (112), and the sensors are located in close proximity to an edge of the final focusing element of the projection lens system.Type: ApplicationFiled: December 23, 2010Publication date: August 11, 2011Applicant: Mapper Lithography IP B.V.Inventors: Guido DE BOER, Johnny Joannes Jacobus VAN BAAR, Kaustubh Prabodh PADHYE, Robert MOSSEL, Niels VERGEER, Stijn Willem Herman Karel STEENBRINK
-
Publication number: 20110193574Abstract: A capacitive sensing system, comprising a sensor having thin film structure, the thin film structure comprising a sensor having a first insulating layer and a first conductive film comprising a sensing electrode formed on a first surface of the first insulating layer and a second conductive film comprising a back guard electrode. The back guard electrode is formed in a single plane and comprises a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.Type: ApplicationFiled: December 23, 2010Publication date: August 11, 2011Applicant: Mapper Lithography IP B.V.Inventors: Guido DE BOER, Johnny Joannes Jacobus Van Baar, Kaustubh Prabodh Padhye, Robert Mossel, Niels Vergeer, Stijn Willem Herman Karel Steenbrink
-
Patent number: RE48901Abstract: A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit (70) having a first input terminal (72) connected to the current source and an output terminal (74) for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals (75, 76) arranged to receive one or more voltages from a power supply (77a, 77b) for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.Type: GrantFiled: May 9, 2019Date of Patent: January 25, 2022Assignee: ASML Netherlands B.V.Inventors: Cor Verburg, Robert Mossel, Kaustubh Prabodh Padhye, Eric de Kok, Willem Jacob Vis