Patents by Inventor Robert Mulfinger

Robert Mulfinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11217678
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: January 4, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: George Robert Mulfinger, Ryan Sporer, Rick J. Carter, Peter Baars, Hans-Jürgen Thees, Jan Höntschel
  • Publication number: 20210091222
    Abstract: A FinFET device is provided, which includes a semiconductor substrate, a fin structure and a dielectric material. The fin structure is extending from the semiconductor substrate, the fin structure having an upper fin section, a middle fin section and a lower fin section. The dielectric material is over the semiconductor substrate embedding a first portion of the lower fin section. The dielectric material forms shallow trench isolation regions of the FinFET device.
    Type: Application
    Filed: September 24, 2019
    Publication date: March 25, 2021
    Inventors: TAO CHU, BINGWU LIU, ANTON VADIMOVICH TOKRANOV, WEI MA, EDMUND KENNETH BANGHART, GEORGE ROBERT MULFINGER, TYLER JAMES SHERWOOD
  • Publication number: 20200083346
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 12, 2020
    Inventors: George Robert MULFINGER, Ryan SPORER, Rick J. CARTER, Peter BAARS, Hans-Jürgen THEES, Jan HÖNTSCHEL
  • Patent number: 10522655
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: December 31, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Ryan Sporer, Rick J. Carter, Peter Baars, Hans-Jürgen Thees, Jan Höntschel
  • Patent number: 10326007
    Abstract: Methods of forming a graded SiGe percentage PFET channel in a FinFET or FDSOI device by post gate thermal condensation and oxidation of a high Ge percentage channel layer and the resulting devices are provided. Embodiments include forming a gate dielectric layer over a plurality of Si fins; forming a gate over each fin; forming a HM and spacer layer over and on sidewalls of each gate; forming a cavity in each fin adjacent to the gate and spacer layer; epitaxially growing an un-doped high percentage SiGe layer in each cavity and along sidewalls of each fin; thermally condensing the high percentage SiGe layer, an un-doped low percentage SiGe formed underneath in the substrate and fins; and forming a S/D region over the high percentage SiGe layer in each u-shaped cavity, an upper surface of the S/D regions below the gate dielectric layer.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: June 18, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Ryan Sporer, Timothy J. McArdle, Judson Robert Holt
  • Publication number: 20190043967
    Abstract: Methods of forming a graded SiGe percentage PFET channel in a FinFET or FDSOI device by post gate thermal condensation and oxidation of a high Ge percentage channel layer and the resulting devices are provided. Embodiments include forming a gate dielectric layer over a plurality of Si fins; forming a gate over each fin; forming a HM and spacer layer over and on sidewalls of each gate; forming a cavity in each fin adjacent to the gate and spacer layer; epitaxially growing an un-doped high percentage SiGe layer in each cavity and along sidewalls of each fin; thermally condensing the high percentage SiGe layer, an un-doped low percentage SiGe formed underneath in the substrate and fins; and forming a S/D region over the high percentage SiGe layer in each u-shaped cavity, an upper surface of the S/D regions below the gate dielectric layer.
    Type: Application
    Filed: July 3, 2018
    Publication date: February 7, 2019
    Inventors: George Robert MULFINGER, Ryan SPORER, Timothy J. MCARDLE, Judson Robert HOLT
  • Patent number: 10122117
    Abstract: An electrical connector and system for connecting to a terminal post. The electrical connector includes a housing body, a contact and a locking release member. The housing body includes a post receiving passage for receiving the terminal post therein. The contact is provided in the post receiving passage and is positioned about the circumference of the post receiving passage. The contact will make an electrical engagement with a terminal post inserted into the post receiving passage regardless of the orientation of the terminal post with respect to the contact. The electrical connector which prevents the improper mating of the connector to the post, prevents unwanted rotation of the connector, provides a visual indication that the proper connection is secured and provides a secondary lock to ensure that unwanted unmating of the connector does not occur.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: November 6, 2018
    Assignee: TE CONNECTIVITY CORPORATION
    Inventors: Keith Edwin Miller, John Anthony Fulponi, Lawrence Se-Jun Oh, John Louis McKibben, Dustin Carson Belack, Lynn Robert Sipe, Robert Mulfinger
  • Publication number: 20180315832
    Abstract: Methods for selectively thinning a silicon channel area under a gate electrode and resulting devices are disclosed. Embodiments include providing a SOI substrate including a Si-layer; providing a first dummy-gate electrode over a first gate-oxide between first spacers over a first channel area of the Si-layer and a second dummy-gate electrode over a second gate-oxide between second spacers over a second channel area of the Si-layer; forming a S/D region adjacent each spacer; forming an oxide over the S/D regions and the spacers; removing the dummy-gate electrodes creating first and second cavities between respective first and second spacers; forming a mask with an opening over the first cavity; removing the first gate-oxide; thinning the Si-layer under the first cavity, forming a recess in the Si-layer; forming a third gate-oxide on recess side and bottom surfaces; and filling the recess and the cavities with metal, forming first and second RMG electrodes.
    Type: Application
    Filed: July 5, 2018
    Publication date: November 1, 2018
    Inventors: George Robert MULFINGER, Dina H. TRIYOSO, Ryan SPORER
  • Patent number: 10050119
    Abstract: Methods for selectively thinning a silicon channel area under a gate electrode and resulting devices are disclosed. Embodiments include providing a SOI substrate including a Si-layer; providing a first dummy-gate electrode over a first gate-oxide between first spacers over a first channel area of the Si-layer and a second dummy-gate electrode over a second gate-oxide between second spacers over a second channel area of the Si-layer; forming a S/D region adjacent each spacer; forming an oxide over the S/D regions and the spacers; removing the dummy-gate electrodes creating first and second cavities between respective first and second spacers; forming a mask with an opening over the first cavity; removing the first gate-oxide; thinning the Si-layer under the first cavity, forming a recess in the Si-layer; forming a third gate-oxide on recess side and bottom surfaces; and filling the recess and the cavities with metal, forming first and second RMG electrodes.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: August 14, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Dina H. Triyoso, Ryan Sporer
  • Patent number: 10043893
    Abstract: Methods of forming a graded SiGe percentage PFET channel in a FinFET or FDSOI device by post gate thermal condensation and oxidation of a high Ge percentage channel layer and the resulting devices are provided. Embodiments include forming a gate dielectric layer over a plurality of Si fins formed over a substrate; forming a gate over each fin; forming a HM and spacer layer over and on sidewalls of each gate; forming a u-shaped cavity in each fin adjacent to the gate and spacer layer; epitaxially growing an un-doped high percentage SiGe layer in each u-shaped cavity and along sidewalls of each fin; thermally condensing the high percentage SiGe layer, an un-doped low percentage SiGe formed underneath in the substrate and fins; and forming a S/D region over the high percentage SiGe layer in each u-shaped cavity, an upper surface of the S/D regions below the gate dielectric layer.
    Type: Grant
    Filed: August 3, 2017
    Date of Patent: August 7, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Ryan Sporer, Timothy J. McArdle, Judson Robert Holt
  • Patent number: 10008576
    Abstract: A method of controlling the facet height of raised source/drain epi structures using multiple spacers, and the resulting device are provided. Embodiments include providing a gate structure on a SOI layer; forming a first pair of spacers on the SOI layer adjacent to and on opposite sides of the gate structure; forming a second pair of spacers on an upper surface of the first pair of spacers adjacent to and on the opposite sides of the gate structure; and forming a pair of faceted raised source/drain structures on the SOI, each of the faceted source/drain structures faceted at the upper surface of the first pair of spacers, wherein the second pair of spacers is more selective to epitaxial growth than the first pair of spacers.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: June 26, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Xusheng Wu
  • Publication number: 20180069091
    Abstract: Methods for selectively thinning a silicon channel area under a gate electrode and resulting devices are disclosed. Embodiments include providing a SOI substrate including a Si-layer; providing a first dummy-gate electrode over a first gate-oxide between first spacers over a first channel area of the Si-layer and a second dummy-gate electrode over a second gate-oxide between second spacers over a second channel area of the Si-layer; forming a S/D region adjacent each spacer; forming an oxide over the S/D regions and the spacers; removing the dummy-gate electrodes creating first and second cavities between respective first and second spacers; forming a mask with an opening over the first cavity; removing the first gate-oxide; thinning the Si-layer under the first cavity, forming a recess in the Si-layer; forming a third gate-oxide on recess side and bottom surfaces; and filling the recess and the cavities with metal, forming first and second RMG electrodes.
    Type: Application
    Filed: September 2, 2016
    Publication date: March 8, 2018
    Inventors: George Robert MULFINGER, Dina H. TRIYOSO, Ryan SPORER
  • Publication number: 20180012973
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Application
    Filed: September 21, 2017
    Publication date: January 11, 2018
    Inventors: George Robert MULFINGER, Ryan SPORER, Rick J. CARTER, Peter BAARS, Hans-Jürgen THEES, Jan HÖNTSCHEL
  • Publication number: 20170330953
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Application
    Filed: May 11, 2016
    Publication date: November 16, 2017
    Inventors: George Robert MULFINGER, Ryan SPORER, Rick J. CARTER, Peter BAARS, Hans-Jürgen THEES, Jan HÖNTSCHEL
  • Patent number: 9806170
    Abstract: A method of forming matched PFET/NFET spacers with differential widths for SG and EG structures and a method of forming differential width nitride spacers for SG NFET and SG PFET structures and PFET/NFET EG structures and respective resulting devices are provided. Embodiments include providing PFET SG and EG structures and NFET SG and EG structures; forming a first nitride layer over the substrate; forming an oxide liner; forming a second nitride layer on sidewalls of the PFET and NFET EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the PFET SG and EG structures; forming RSD structures on opposite sides of each of the PFET SG and EG structures; removing horizontal portions of the first nitride layer and the oxide liner over the NFET SG and EG structures; and forming RSD structures on opposite sides of each of the NFET SG and EG structures.
    Type: Grant
    Filed: May 11, 2016
    Date of Patent: October 31, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Ryan Sporer, Rick J. Carter, Peter Baars, Hans-Jürgen Thees, Jan Höntschel
  • Publication number: 20170222015
    Abstract: A method of controlling the facet height of raised source/drain epi structures using multiple spacers, and the resulting device are provided. Embodiments include providing a gate structure on a SOI layer; forming a first pair of spacers on the SOI layer adjacent to and on opposite sides of the gate structure; forming a second pair of spacers on an upper surface of the first pair of spacers adjacent to and on the opposite sides of the gate structure; and forming a pair of faceted raised source/drain structures on the SOI, each of the faceted source/drain structures faceted at the upper surface of the first pair of spacers, wherein the second pair of spacers is more selective to epitaxial growth than the first pair of spacers.
    Type: Application
    Filed: April 18, 2017
    Publication date: August 3, 2017
    Inventors: George Robert MULFINGER, Xusheng WU
  • Patent number: 9704971
    Abstract: A method of controlling the facet height of raised source/drain epi structures using multiple spacers, and the resulting device are provided. Embodiments include providing a gate structure on a SOI layer; forming a first pair of spacers on the SOI layer adjacent to and on opposite sides of the gate structure; forming a second pair of spacers on an upper surface of the first pair of spacers adjacent to and on the opposite sides of the gate structure; and forming a pair of faceted raised source/drain structures on the SOI, each of the faceted source/drain structures faceted at the upper surface of the first pair of spacers, wherein the second pair of spacers is more selective to epitaxial growth than the first pair of spacers.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: July 11, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: George Robert Mulfinger, Xusheng Wu
  • Publication number: 20170170291
    Abstract: A method of controlling the facet height of raised source/drain epi structures using multiple spacers, and the resulting device are provided. Embodiments include providing a gate structure on a SOI layer; forming a first pair of spacers on the SOI layer adjacent to and on opposite sides of the gate structure; forming a second pair of spacers on an upper surface of the first pair of spacers adjacent to and on the opposite sides of the gate structure; and forming a pair of faceted raised source/drain structures on the SOI, each of the faceted source/drain structures faceted at the upper surface of the first pair of spacers, wherein the second pair of spacers is more selective to epitaxial growth than the first pair of spacers.
    Type: Application
    Filed: December 9, 2015
    Publication date: June 15, 2017
    Inventors: George Robert MULFINGER, Xusheng WU
  • Publication number: 20160308304
    Abstract: An electrical connector and system for connecting to a terminal post. The electrical connector includes a housing body, a contact and a locking release member. The housing body includes a post receiving passage for receiving the terminal post therein. The contact is provided in the post receiving passage and is positioned about the circumference of the post receiving passage. The contact will make an electrical engagement with a terminal post inserted into the post receiving passage regardless of the orientation of the terminal post with respect to the contact. The electrical connector which prevents the improper mating of the connector to the post, prevents unwanted rotation of the connector, provides a visual indication that the proper connection is secured and provides a secondary lock to ensure that unwanted unmating of the connector does not occur.
    Type: Application
    Filed: April 11, 2016
    Publication date: October 20, 2016
    Inventors: Keith Edwin MILLER, John Anthony FULPONI, Lawrence Se-Jun OH, John Louis MCKIBBEN, Dustin Carson BELACK, Lynn Robert SIPE, Robert MULFINGER
  • Patent number: 9449826
    Abstract: In sophisticated semiconductor devices, an asymmetric transistor configuration may be obtained on the basis of an asymmetric well implantation while avoiding a tilted implantation process. For this purpose, a graded implantation mask may be formed, such as a graded resist mask, which may have a higher ion blocking capability at the drain side compared to the source side of the asymmetric transistor. For instance, the asymmetric configuration may be obtained on the basis of a non-tilted implantation process with a high degree of performance gain and may be accomplished irrespective of the technology standard under consideration.
    Type: Grant
    Filed: January 25, 2010
    Date of Patent: September 20, 2016
    Assignee: Advanced Micro Devices, Inc.
    Inventors: G Robert Mulfinger, Andy Wei, Jan Hoentschel, Vassilios Papageorgiou