Patents by Inventor Robert N. Norwood

Robert N. Norwood has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Bottom antireflective coatings through refractive index modification by anomalous dispersion
    Patent number: 6042992
    Abstract: The invention provides a process for the generation of an antireflective bottom layer with effective reduction of substrate reflectivity and swing curve effects in lithographic applications. It involves the use of a suitably selected monomeric and/or polymeric dye which brings the real part of the refractive index into a range which is optimal for the suppression of reflection-related effects. The refractive index change is effected via anomalous dispersion, i.e., by utilizing changes in the real part of the refractive index caused by the bottom layer's absorption.
    Type: Grant
    Filed: March 6, 1997
    Date of Patent: March 28, 2000
    Assignee: Clariant Finance (BVI) Limited
    Inventors: Ralph R. Dammel, Robert N. Norwood