Abstract: The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.

Abstract: The present invention is a support structure for supporting a reticle or silicon wafer. The support structure includes a support column and a retaining structure. In addition to retaining a wafer, the present invention also creates a discharge path to remove electrostatic charges from the wafer. The retaining structure mechanically engages each support column to create a discharge path from the wafer to a ground. Specifically, electrostatic charges that dissipate from the wafer travel along the support structure to the support column and exit the SMIF pod through the pod door.

Abstract: The present invention is a support structure for supporting a reticle or silicon wafer. The support structure includes a support column and a retaining structure. In addition to retaining a wafer, the present invention also creates a discharge path to remove electrostatic charges from the wafer. The retaining structure mechanically engages each support column to create a discharge path from the wafer to a ground. Specifically, electrostatic charges that dissipate from the wafer travel along the support structure to the support column and exit the SMIF pod through the pod door.

Abstract: The present invention includes a latch assembly, such as maybe useful for SMIF pods. SMIF pods are in general comprised of a pod door which mates with a pod shell to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door is typically held affixed to the pod shell by a latch assembly. When it is desired to separate the pod door from the pod shell, each latch must be actuated outwardly, to withdraw each engagement portion from the pod door, at which time the pod door may be separated. The present invention includes an improved such latch assembly.

Abstract: A pod having a novel manual pivoting handle assembly for transporting the pod to and from processing tools in a semiconductor wafer fab. The handle assembly comprises a bracket, a pivoting handle and a spindle. The bracket is a Z-shaped member and includes two D-shaped cut-outs at the top of the bracket and two circular cut-outs at the bottom of the bracket which are placed over T-shaped protrusions and aligned with mounting sleeves located on a recessed area on a pod cover, respectively. Screws fit through the circular cut-outs on the bottom of the bracket and may be threaded into the mounting sleeves on the pod. The bracket includes a mounting boss which is provided for mounting the pivoting handle and includes a notch on the lower portion. The pivoting handle is contoured and held in a manner similar to holding a pistol. The pivoting handle includes grooves on one side for placement of the fingers which facilitates a better grip for the user when transporting the pod.

Abstract: A reticle support mechanism is disclosed in which a reticle may be quickly and easily located and removed, and which is capable of securely supporting a reticle for storage and/or transport. A preferred embodiment of the present invention includes a pair of reticle supports mounted to a door of a container, and a pair of reticle retainers mounted to a shell of the container. When the container shell is coupled with the container door, sections of the reticle support and reticle retainer engage chamfered edges of the reticle and sandwich the reticle in a secure position within the container. As a result of engaging the reticle at its chamfered edges, potentially harmful contact with the upper and lower surfaces and vertical edges of the reticle is avoided.

Abstract: A valve mounted in pod door of a SMIF pod for allowing gas flow to and from the sealed pod while the pod is seated on a SMIF port. The valve is provided to allow fluid flow to or from the pod upon the valve be actuated by either a standard registration pin or a specially adapted fluid flow pin. The valve includes a body and a valve stem capable of vertical translation within the valve body. A spring biases the valve stem downward with respect to the valve body such that a top of the valve stem lies in sealing engagement with a O-ring 54. When not engaged by a registration pin or fluid flow pin, the engagement between the valve top and the O-ring prevents passage of fluid into or out of the pod.

Abstract: A transportable, sealable container, for example a Standard Mechanical Interface (or SMIF) pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. A liner, preferably stainless steel, is attached to the inside surface of the box door. An elastomer sealing material is integrally molded to the liner. The sealing material forms a first seal with the first sealing surface and a second seal with the second sealing surface when the box door is moved in a sealing position with respect to the box.

Abstract: An improved door slide operating mechanism consisting of a door slide with an operated end having a clevis link, a crank having a lower long journal received in a bored boss formed in the bottom portion of a disk cartridge casing and a short upper journal received in a bored boss formed in an upper casing portion, and a spring wound in tension about the lower journal boss and having a free arm biased against an operating end of the crank.The mechanism is easily assembled by winding the spring about the boss, inserting a temporary holding pin into an additional boss formed in the bottom casing to provide a stop for the spring arm, engaging a forked end of a crank arm with the door slide clevis, inserting the long lower journal into its corresponding bore, and removing the temporary pin so that the free spring end bears against a stop provided on the crank arm.

Abstract: A releasable hub locking mechanism for a disk hub assembly and a magnetic memory cartridge. A lever plate having an inner margin with a pair of hub flange pressure portions in surface contact with the lower surface of an inner hub flange arranged within the cartridge housing includes an outer margin with a lower release portion received in an aperture in the bottom portion of the cartridge housing. A longitudinally extending torsion spring has first and second ends secured against rotation by keeper bosses formed in the bottom casing portion and includes a central loop portion for applying a downward pressure to an inwardly extending tang located on the outer margin of the lever plate.The torsion spring normally provides a rotational force to the lever plate to cause the hub to be locked in place by interference between the lower surface of the bottom casing portion and a lower hub flange located externally of the casing.

Abstract: A removable hard disc memory cartridge for use with a drive mechanism including a spindle located within a drive housing.The drive housing interior is provided with stationary position registration members which cooperate with mating side edge portions of the cartridge to provide positive positioning when the cartridge is inserted into the drive housing. A disc lock carried by the cartridge maintains the internally mounted cartridge disc in a secured locked position when the cartridge is not in use, the lock mechanism cooperating with release posts carried by the drive housing to free the disc for rotation just prior to engagement by the drive spindle.

Abstract: A holder for removably receiving a plurality of magnetic memory disks and for holding the disks in a vertical stack. The holder includes a base having a center post secured thereto and extending upwardly therefrom. The post is adapted to receive the magnetic disks thereon with the disks being arranged on the posts in generally parallel, horizontal planes and separated from each other by ring-like spacers. A nut is removably mounted on the post for locking the disks in place. The nut has a number of spaced projections on its inner periphery for engagement with spaced, circumferentially extending screw thread segments on the outer surface of the post. The segments are spaced from each other to present recesses for receiving the projections on the nut when the nut is first placed on and moved axially along the post until the nut rests on the uppermost spacer. By rotating the nut through a finite angle, such as 30.degree. to 95.degree.