Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.

Abstract: A new and useful apparatus and technique are provided for supporting a human hand in an operating environment, particularly a biometric identification system, in which imaging of the back of a person's hand, particularly the back of the person's palm, is used as the biometric identifier. Consistently supporting a human hand in an operating environment enables a biometric feature of the person's hand (e.g. the vein pattern of the person's hand) to be compared to a previously recorded digitized image of the person's hand, in order to identify the person. The present invention provides a three dimensional rounded support surface that is configured to receive and support a human hand, with the back side of the palm facing a predetermined portion of the operating environment (e.g. the imaging device of the scanning system).