Abstract: Methods and systems for compensating for uncertainty in illumination angle of incidence to enable accurate measurements of semiconductor structures are described herein. In one aspect, measurements are performed at one or more nominal angles of incidence, an actual angle of incidence corresponding to each measurement is estimated, and a value of a parameter of interest characterizing a measured structure is estimated based at least in part on the collected measurement data and the actual angle of incidence. In some examples, an actual angle of incidence is directly measured. In some other examples, an actual angle of incidence is estimated from measurement data collected over a range of nominal illumination angles of incidence. In some other examples, an actual angle of incidence with respect to a tilted structure is estimated from measurement data collected over a range of nominal illumination angles of incidence.

Abstract: The present invention relates to a sheet material having desiccant properties, comprising a base material and a hygroscopic material. The invention also relates to a pack comprising the sheet material, which may be used to hold a consumable for use in a non-combustible aerosol provision system. Methods of preparing the sheet material and uses thereof are also provided.

Abstract: The invention relates to a composition comprising an aerosol-generating material comprising a dried precursor material comprising an extract from a flavour- and/or active-containing plant material and optionally an aerosol-former material, and a sorbent material. The compositions may be used to generate an aerosol. For example, the compositions may be used in combustible or non-combustible aerosol-provision systems. The invention also relates to aerosol-provision systems comprising the composition, and methods of providing a composition.

Abstract: The invention relates to a composition comprising an aerosol-generating material comprising a dried precursor material comprising an extract from a flavour- and/or active-containing plant material and optionally an aerosol-former material, and a moisture impermeable coating surrounding the aerosol-generating material. The compositions may be used to generate an aerosol. For example, the compositions may be used in combustible or non-combustible aerosol-provision systems. The invention also relates to aerosol-provision systems comprising the compositions, and methods of providing a composition.

Abstract: The invention relates to a moisture-impermeable container comprising an aerosol-generating material comprising a dried precursor material comprising an extract from a flavour- and/or active-containing plant material and optionally an aerosol-former material. The containers comprising the aerosol-generating material may be used to generate an aerosol. For example, the containers may be used in combustible or non-combustible aerosol-provision systems. The invention also relates to aerosol-provision systems comprising the containers, and methods of providing a container.

Abstract: The invention relates to aerosol-generating compositions for printing, the compositions comprising a solid aerosol-generating material comprising a dried extract from a flavour-and/or active-containing plant material, wherein the solid aerosol-generating material is suspended or dissolved in a liquid component. The aerosol-generating composition may be applied to a support to form a substrate. The aerosol-generating composition may be used to generate an aerosol. For example, the aerosol-generating composition may be used in non-combustible aerosol-provision systems. The invention also relates to aerosol-provision systems comprising the aerosol-generating composition, and methods of providing the aerosol-generating composition.

Abstract: The invention relates to substrates comprising an aerosol-generating material surrounded by a support, the aerosol-generating material comprising a dried precursor material comprising an extract from a flavour- and/or active-containing plant material and optionally an aerosol-former material. The substrates may be used to generate an aerosol. For example, the substrates may be used in combustible or non-combustible aerosol-provision systems. The invention also relates to aerosol-provision systems comprising the substrates, and methods of providing a substrate.

Abstract: The invention relates to substrates comprising an aerosol-generating material and a support comprising a rough and/or porous surface, the aerosol-generating material comprising a dried precursor material comprising an extract from a flavour- and/or active-containing plant material and optionally an aerosol-former material. The substrates may be used to generate an aerosol. For example, the substrates may be used in combustible or non-combustible aerosol-provision systems. The invention also relates to aerosol-provision systems comprising the substrates, and methods of providing a substrate.

Abstract: A method of making a consumable (2) for use with a non-combustible aerosol provision system is disclosed. The consumable (2) comprises aerosol generating material, a support (4), and a cover (6). In the method a support (4), cover (6), and cover support (30) are provided, and the cover support (30) is positioned adjacent the support (4) between a portion of a first surface (8) of the support (4) and the cover (6) in a cover position. The cover (6) is fixed to the support (4). At least one discrete portion (12) of aerosol generating material is applied to the first surface (8) of the support (4), and the cover support (30) when located in the cover position overlies at least one discrete portion (12) of aerosol generating material.

Abstract: A consumable (2) for insertion into an aerosol provision device Is disclosed. The consumable (2) comprises a support (4), aerosol generating material (6), and a sealing element (8, 10). The support (4) comprises one or more flow path faces (20), and the one or more flow path faces (20) of the support (4) at least partially define a flow path for atmospheric air. At least one of the one or more flow path faces (20) of the support (4) supports one or more discrete portions (6) of the aerosol generating material. The sealing element (8, 10) may be moved from a first position in which it blocks the flow of atmospheric air along the flow path, to a second position in which the sealing element (8, 10) does not block the flow of atmospheric air along the flow path.

Abstract: Methods and systems for measuring the orientation of a wafer at or near an X-ray scatterometry measurement location are described herein. In one aspect, an X-ray scatterometry based metrology system includes a wafer orientation measurement system that measures wafer orientation based on a single measurement without intervening stage moves. In some embodiments, an orientation measurement spot is coincident with an X-ray measurement spot. In some embodiments, an X-ray scatterometry measurement and a wafer orientation measurement are performed simultaneously. In another aspect, signals detected by a wafer orientation measurement system are filtered temporally, spatially, or both, to improve tracking. In another aspect, a wafer orientation measurement system is calibrated to identify the orientation of the wafer with respect to an incident X-ray beam. In another aspect, a wafer under measurement is positioned based on the measured orientation in a closed loop or open loop manner.

Abstract: Methods and systems for measuring the orientation of a wafer at or near an X-ray scatterometry measurement location are described herein. In one aspect, an X-ray scatterometry based metrology system includes a wafer orientation measurement system that measures wafer orientation based on a single measurement without intervening stage moves. In some embodiments, an orientation measurement spot is coincident with an X-ray measurement spot. In some embodiments, an X-ray scatterometry measurement and a wafer orientation measurement are performed simultaneously. In another aspect, signals detected by a wafer orientation measurement system are filtered temporally, spatially, or both, to improve tracking. In another aspect, a wafer orientation measurement system is calibrated to identify the orientation of the wafer with respect to an incident X-ray beam. In another aspect, a wafer under measurement is positioned based on the measured orientation in a closed loop or open loop manner.

Abstract: A dynamic data display system and associated method of usage. A portion of a data feed is dynamically displayed, such as in spreadsheet format, on a main drawer D0 that overlays a display screen. N additional drawers D1, D2, . . . , DN are positioned such that D1 conditionally overlays D0, D2 conditionally overlays D1, . . . , DN conditionally overlays DN?1. N is at least 2. Each drawer Di (i=1, 2, . . . , N) is adapted to being opened or to being closed. A user command is directed to a first drawer of the N additional drawers, which causes content on a second drawer of the N additional drawers to be displayed in accordance with the user command.

Abstract: A dynamic data display system and associated method of usage. A portion of a data feed is dynamically displayed, such as in spreadsheet format, on a main drawer D0 that overlays a display screen. N additional drawers D1, D2, . . . , DN are positioned such that D1 conditionally overlays D0, D2 conditionally overlays D1, . . . , DN conditionally overlays DN−1. N is at least 2. Each drawer Di (i=1, 2, . . . , N) is adapted to being opened or to being closed. A user command is directed to a first drawer of the N additional drawers, which causes content on a second drawer of the N additional drawers to be displayed in accordance with the user command.