Abstract: An ultrasonic transducer multilayer structure, including: a semiconductor layer stack defining a diode, a micro-machined ultrasonic transducer, MUT, layer stack being electrically in series with said diode and comprising a first electrically conductive layer disposed at least partly on the diode, a cavity extending over a region comprising at least a portion of the semiconductor layer stack and the first electrically conductive layer, wherein the MUT layer stack comprises a membrane extending at least partly over said region. The ultrasonic transducer multilayer structure may be used in a sensor apparatus for measuring at least one characteristic of an object. The sensor apparatus is used for medical imaging, such as cardiac imaging, obstetrics, gynaecology, abdominal imaging, intravascular imaging, and mammography, or non-destructive testing (NDA), fingerprint sensors, range finders, gesture recognition, ultrasonic haptic feedback, ultrasonic communication or MEMs speakers.

Abstract: The present invention relates generally to the restoration or improvement of the quality of human vision and, more particularly to a self-adapting system and method for achieving automatic sharp vision by the human eye of objects for instance at distances between 25 cm and more than 10 meters away. The invention can be situated in at least four technological domains: 1. ophthalmology, in particular the implantation of intraocular lenses. 2. Non-contact biometric signal recording and processing. 3. Electro-optic control of refractive lens power. 4. Wireless energy transfer.

Abstract: The invention relates to an intracorporeal probe (10), for example preferably for examining hollow organs or natural or artificially created body cavities in the human or animal body, the probe (10) being designed in the form of a capsule that can be introduced into the body without external connecting elements, comprising an elongate housing (16) and an image pickup unit (26) inside the housing (16) that is designed for optically recording a region (pickup region) outside the probe (10). The image pickup unit (26) is held in a fashion capable of moving inside the housing (16) in order to vary the pickup region by means of such a movement (FIG. 1).

Abstract: The present disclosure is related to a method for sharpening the tip of a microprobe, in particular a neural probe or an array of neuroprobes having a common base portion. The probes have a constant thickness and a chisel-shaped tip portion. The probes are attached to the slanted side of a wedge-shaped carrier, with the probe tips placed in close proximity to the edge of the carrier, for example extending over said edge. The base of the carrier is then subjected to a grinding step, possibly followed by a polishing step, so that the probe tips of the probes are ground to form a sharp pointed tip shape.

Abstract: A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).

Abstract: The present invention relates generally to the restoration or improvement of the quality of human vision and, more particularly to a self-adapting system and method for achieving automatic sharp vision by the human eye of objects for instance at distances between 25 cm and more than 10 meters away. The invention can be situated in at least four technological domains: 1. ophthalmology, in particular the implantation of intraocular lenses. 2. Non-contact biometric signal recording and processing. 3. Electro-optic control of refractive lens power. 4. Wireless energy transfer.

Abstract: The present disclosure is related to a method for sharpening the tip of a microprobe, in particular a neural probe or an array of neuroprobes having a common base portion. The probes have a constant thickness and a chisel-shaped tip portion. The probes are attached to the slanted side of a wedge-shaped carrier, with the probe tips placed in close proximity to the edge of the carrier, for example extending over said edge. The base of the carrier is then subjected to a grinding step, possibly followed by a polishing step, so that the probe tips of the probes are ground to form a sharp pointed tip shape.

Abstract: A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).

Abstract: The present invention is related to a method for masked anodization of an anodizable layer on a substrate, for example an aluminum layer present on a sacrificial layer, wherein the sacrificial layer needs to be removed from a cavity comprising a Micro or Nano Electromechanical System (MEMS or NEMS). Anodization of an Al layer leads to the formation of elongate pores, through which the sacrificial layer can be removed. According to the method of the invention, the anodization of the Al layer is done with the help of a first mask which defines the area to be anodized, and a second mask which defines a second area to be anodized, said second area surrounding the first area. Anodization of the areas defined by the first and second mask leads to the formation of an anodized structure in the form of a closed ring around the first area, which forms a barrier against unwanted lateral anodization in the first area.

Abstract: The current invention provides a stepping actuator, achieving large range up to ±35 ?m with low operating voltages of 15V or lower and large output forces of up to ±110 ?N. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.

Abstract: In the present disclosure a device for sensing and/or actuation purposes is presented in which microstructures (20) comprising shafts (2) with different functionality and dimensions can be inserted in a modular way. That way, out-of-plane connectivity, mechanical clamping between the microstructures (20) and a substrate (1) of the device, and electrical connection between electrodes (5) on the microstructures (20) and the substrate (1) can be realized. Connections to external circuitry can be realised. Microfluidic channels (10) in the microstructures (20) can be connected to external equipment. A method to fabricate and assemble the device is provided.

Abstract: In the present disclosure a device for sensing and/or actuation purposes is presented in which microstructures (20) comprising shafts (2) with different functionality and dimensions can be inserted in a modular way. That way, out-of-plane connectivity, mechanical clamping between the microstructures (20) and a substrate (1) of the device, and electrical connection between electrodes (5) on the microstructures (20) and the substrate (1) can be realized. Connections to external circuitry can be realised. Microfluidic channels (10) in the microstructures (20) can be connected to external equipment. A method to fabricate and assemble the device is provided.

Abstract: The current invention provides a stepping actuator, achieving large range up to ±35 ?m with low operating voltages of 15V or lower and large output forces of up to ±110 ?N. The actuator has an in-plane-angular deflection conversion which allows achieving step sizes varying from few nanometers to few micrometers with a minor change in the design. According to certain embodiments of the invention, the stepping actuator comprises a geometrical structure with a displacement magnification ratio of between 0.15 and 2 at operating voltages of 15V or lower. The present invention also provides a method for forming such stepping actuators.

Abstract: The invention relates to an intracorporeal probe (10), for example preferably for examining hollow organs or natural or artificially created body cavities in the human or animal body, the probe (10) being designed in the form of a capsule that can be introduced into the body without external connecting elements, comprising an elongate housing (16) and an image pickup unit (26) inside the housing (16) that is designed for optically recording a region (pickup region) outside the probe (10). The image pickup unit (26) is held in a fashion capable of moving inside the housing (16) in order to vary the pickup region by means of such a movement (FIG. 1).