Patents by Inventor Robert R Botts

Robert R Botts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anode basket for controlling plating thickness distribution
    Patent number: 5744013
    Abstract: An anode basket containing anode particles used for electroplating a work piece. The anode basket includes baffles positioned inside the basket at selected locations. Hinges secure the baffles to opposing sidewalls of the basket and allow the baffles to pivot when sufficient manual force is applied to the respective hinges and/or baffle. The hinged baffles can be positioned to form separate compartments, enabling anode particles to be placed in different amounts at selected locations. If desired, some of the locations can have no anode particles. This permits more focused control of the metal ions.
    Type: Grant
    Filed: December 12, 1996
    Date of Patent: April 28, 1998
    Assignee: Mitsubishi Semiconductor America, Inc.
    Inventors: Robert R Botts, Swati V. Joshi, Louis W. Nicholls