Patents by Inventor Robert R. Matthews

Robert R. Matthews has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200320159
    Abstract: Heat a heater fluid a superconductor of magnetic-enthalpy in symbol H integral sub-plasma isotopic class [A] thermal cycle matter random dilution of random matrices HN=UN FN U†N, where UN are uniformly distributed over the group of N×N unitary matrices and FN are non-random Hermitian matrices, and The Real and Complex Hermitian Solutions to a System of Quaternion Matrix Equations with Applications by Shao-Wen Yu 1. Combination of the associative and commutative axioms arithmetic progression number of n point coordinate ordered set in series of a real or complex valued axiom of commutativity ??A sub-plasma set (real or complex valued) singletons have points and the entire space Rn is our solution set of an arbitrary possibly, of linear inequalities with n unknowns x closed priori measures that the moments solution, or the weighted set of an arbitrary possibly n=2.
    Type: Application
    Filed: March 22, 2019
    Publication date: October 8, 2020
    Inventor: Robert R. Matthews
  • Publication number: 20080076689
    Abstract: A method of removing photoresist materials from a silicon wafer, by exposing a silicon wafer having a photoresist thereon to a solute of Ozonated Acetic Anhydride, thereby removing the photoresist from the silicon wafer.
    Type: Application
    Filed: September 27, 2006
    Publication date: March 27, 2008
    Inventor: Robert R. Matthews
  • Publication number: 20040159335
    Abstract: Embodiments in accordance with the present invention provide methods and apparatuses for heating a substrate with radiation during processing of substrates. Radiation in the radio or microwave portion of the electromagnetic spectrum is applied to a substrate housed within a processing chamber to promote desirable chemical reactions involving the substrate. Processing in accordance with embodiments of the present invention may utilize pressurization of the processing chamber in conjunction with the application of microwave, RF, IR, or UV radiation, or electromagnetic induction, to heat the substrate or a component of the processing chemistry present within the chamber. Alternative embodiments of the present invention may use combinations of these energy types for more effective processing. For example, UV radiation may be introduced into the chamber in conjunction with microwave heating in order to generate reactive species from the processing chemistry.
    Type: Application
    Filed: June 6, 2003
    Publication date: August 19, 2004
    Applicant: P.C.T. Systems, Inc.
    Inventors: Garry L. Montierth, Robert R. Matthews
  • Publication number: 20030086821
    Abstract: The present invention provides systems and methods for destroying pathogens (including bacteria and viruses) from delivery, postal or courier items such as letters, parcels, boxes, etc. In preferred aspects, the items to be treated are placed in a chamber which is then flooded with ozone gas at pressures above ambient atmospheric pressure. The exposure to pressurized ozone is carried out at a sufficiently high concentration, and for a sufficiently long duration such that the sterilizing ozone penetrates into the interior of the delivery, postal or courier item.
    Type: Application
    Filed: December 21, 2001
    Publication date: May 8, 2003
    Inventor: Robert R. Matthews
  • Patent number: 5464480
    Abstract: Provided is a process for removing organic materials from semiconductor wafers. The process involves the use of subambient deionized water with ozone absorbed into the water. The ozonated water flows over the wafers and the ozone oxidizes the organic materials from the wafers to insoluble gases. The ozonated water may be prepared in-situ by diffusing ozone into a tank containing wafers and subambient deionized water. Also provided is a tank for the treatment of semiconductor wafers with a fluid and a gas diffuser for diffusion of gases directly into fluids in a wafer treatment tank.
    Type: Grant
    Filed: July 16, 1993
    Date of Patent: November 7, 1995
    Assignee: Legacy Systems, Inc.
    Inventor: Robert R. Matthews
  • Patent number: 5429251
    Abstract: An end effector for holding or carrying semiconductor wafers during wet processing is disclosed. The end effector holds a plurality wafers with only two points of contact intruding onto the front or back surface of the wafer, holding the wafer with substantially no movement during processing at a slight angle from vertical.
    Type: Grant
    Filed: September 22, 1993
    Date of Patent: July 4, 1995
    Assignee: Legacy Systems, Inc.
    Inventor: Robert R. Matthews
  • Patent number: 4856593
    Abstract: Stoppage of gas-water streams due to the formation of gas hydrates is prevented by incorporating in such streams a surface active agent which inhibits the formation of gas hydrates and/or the agglomeration of hydrate crystallites into large crystalline masses.
    Type: Grant
    Filed: September 21, 1987
    Date of Patent: August 15, 1989
    Assignee: Conoco Inc.
    Inventors: Robert R. Matthews, Charles R. Clark