Patents by Inventor Robert Rogatschnig

Robert Rogatschnig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for treating surfaces of wafer-shaped articles
    Patent number: 9548223
    Abstract: A device and method for processing wafer-shaped articles comprises a process chamber and a rotary chuck located within the process chamber. The rotary chuck is adapted to be driven without physical contact through a magnetic bearing. The rotary chuck comprises a series of gripping pins adapted to hold a wafer shaped article in a position depending downwardly from the rotary chuck. The rotary chuck further comprises a plate that rotates together with the rotary chuck. The plate is positioned above an area occupied by the wafer-shaped article, and shields upper surfaces of the process chamber from liquids flung off of a wafer-shaped article during use of the rotary chuck.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: January 17, 2017
    Assignee: LAM RESEARCH AG
    Inventors: Dieter Frank, Robert Rogatschnig, Andreas Gleissner
  • APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
    Publication number: 20130160260
    Abstract: A device and method for processing wafer-shaped articles comprises a process chamber and a rotary chuck located within the process chamber. The rotary chuck is adapted to be driven without physical contact through a magnetic bearing. The rotary chuck comprises a series of gripping pins adapted to hold a wafer shaped article in a position depending downwardly from the rotary chuck. The rotary chuck further comprises a plate that rotates together with the rotary chuck. The plate is positioned above an area occupied by the wafer-shaped article, and shields upper surfaces of the process chamber from liquids flung off of a wafer-shaped article during use of the rotary chuck.
    Type: Application
    Filed: December 23, 2011
    Publication date: June 27, 2013
    Applicant: LAM RESEARCH AG
    Inventors: Dieter Frank, Robert Rogatschnig, Andreas Gleissner