Abstract: An Al—Sc alloy sputtering target. The target comprising from 1.0 at % to 65 at % scandium and from 35 at % to 99 at % aluminum and having a microstructure including a first aluminum matrix phase and a second phase dispersed uniformly therethrough. The second phase comprises one or more compounds corresponding to the formula ScxAly, where x is from 1 to 2 and y is from 0 to 3.

Abstract: Methods and controllers are described that facilitate the determination of an operational skip fire firing fraction for an engine based at least in part noise levels and/or vehicle vibration levels that are not induced by engine operation. In some embodiments, the firing fraction is determined based at least in part of noise or vibrations associated with road roughness and/or cabin noise levels.

Abstract: A system and method for dynamically varying an amount slippage of a Torque Converter Clutch (TCC) provided between an engine and a transmission of a vehicle in response to non-powertrain factors. By varying a slippage output signal, the amount of TCC slippage between the engine and the transmission can be adjusted. Small amounts of slippage, relative to large amounts of slippage, provide (a) improved vehicle fuel economy, but (b) induce more powertrain noise and vibration in the vehicle cabin. By dynamically adjusting the slippage, a tradeoff between improved fuel economy vs. a satisfying driver experience can be realized.

Abstract: A variety of methods, diagnostic modules and other arrangements for detecting air induction faults during operation of an internal combustion engine are described. In some embodiments, the intake manifold pressure is monitored with the intake pressure being read for each induction opportunity. Induction faults may be detected based at least in part on a comparison of the manifold pressure readings for sequential induction opportunities. In some embodiments, an induction fault is identified when the difference between the manifold pressure associated with an induction opportunity and the immediately preceding induction opportunity exceeds an induction fault threshold.

Abstract: Generally planar sputter targets having a reverse bow surface (i.e., convexity) facing the magnets in a magnetron assembly is provided. Methods of making Cu and Cu alloy targets are provided including an annealing step performed at temperatures of from 1100-1300 F for a period of about 1-2 hours. Targets made by the methods have increased grain sizes on the order of 30-90 microns.

Abstract: A variety of methods and arrangements for detecting failure of the commanded air induction in an internal combustion engine are described. In some embodiments, the intake manifold pressure is monitored. An air induction event generates a fluctuation in the intake manifold pressure, which is recorded. The signal is processed through a diagnostic filter to help determine whether the actual induction matched the commanded induction. In other embodiments, measured crankshaft acceleration is compared with estimated crankshaft acceleration. If the two quantities differ by a threshold amount an induction fault is detected. The two detection methods may also be combined. The describe approaches are particularly well suited for use in engines operating in a skip fire mode with cylinder deactivation and/or a dynamic firing level modulation mode.

Abstract: A variety of methods and arrangements for detecting failure of the commanded air induction in an internal combustion engine are described. In some embodiments, the intake manifold pressure is monitored. An air induction event generates a fluctuation in the intake manifold pressure, which is recorded. The signal is processed through a diagnostic filter to help determine whether the actual induction matched the commanded induction. In other embodiments, measured crankshaft acceleration is compared with estimated crankshaft acceleration. If the two quantities differ by a threshold amount an induction fault is detected. The two detection methods may also be combined. The describe approaches are particularly well suited for use in engines operating in a skip fire mode with cylinder deactivation and/or a dynamic firing level modulation mode.

Abstract: A variety of methods and arrangements for detecting failure of the commanded air induction in an internal combustion engine are described. In some embodiments, the intake manifold pressure is monitored. An air induction event generates a fluctuation in the intake manifold pressure, which is recorded. The signal is processed through a diagnostic filter to help determine whether the actual induction matched the commanded induction. In other embodiments, measured crankshaft acceleration is compared with estimated crankshaft acceleration. If the two quantities differ by a threshold amount an induction fault is detected. The two detection methods may also be combined. The describe approaches are particularly well suited for use in engines operating in a skip fire mode with cylinder deactivation and/or a dynamic firing level modulation mode.

Abstract: A method of making a diffusion bonded sputter target assembly is provided. A target blank comprising a first metal or alloy has a first surface defining a sputtering surface and a second surface. A second metal or alloy is placed around the target blank. A backing plate is provided adjacent the second metal or alloy that is positioned alongside of the second target surface. This assembly is then diffusion bonded, and a portion of the second metal overlying the sputtering surface of the target is removed to expose the target sputtering surface. W target or W alloy target/Ti or Ti alloy backing plate assemblies are provided with an Al interlayer positioned intermediate the W or W alloy target and backing plate. The assembly has a bond strength exceeding 50 MPa.

Abstract: A method of making a diffusion bonded sputter target assembly is provided. A target blank comprising a first metal or alloy has a first surface defining a sputtering surface and a second surface. A second metal or alloy is placed around the target blank. A backing plate is provided adjacent the second metal or alloy that is positioned alongside of the second target surface. This assembly is then diffusion bonded, and a portion of the second metal overlying the sputtering surface of the target is removed to expose the target sputtering surface. W target or W alloy target/Ti or Ti alloy backing plate assemblies are provided with an Al interlayer positioned intermediate the W or W alloy target and backing plate. The assembly has a bond strength exceeding 50 MPa.

Abstract: In one aspect, a skip fire engine controller is described. The skip fire engine controller includes a skip fire module arranged to determine an operational firing fraction and associated cylinder load for delivering a desired engine output. The skip fire engine controller also includes a firing controller arranged to direct firings in a skip fire manner that delivers the selected operational firing fraction. Various methods, modules, lookup tables and arrangements related to the selection of a suitable operational firing fraction are also described.

Abstract: A variety of methods and arrangements for detecting failure of the commanded air induction in an internal combustion engine are described. In some embodiments, the intake manifold pressure is monitored. An air induction event generates a fluctuation in the intake manifold pressure, which is recorded. The signal is processed through a diagnostic filter to help determine whether the actual induction matched the commanded induction. In other embodiments, measured crankshaft acceleration is compared with estimated crankshaft acceleration. If the two quantities differ by a threshold amount an induction fault is detected. The two detection methods may also be combined. The describe approaches are particularly well suited for use in engines operating in a skip fire mode with cylinder deactivation and/or a dynamic firing level modulation mode.

Abstract: Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.

Abstract: A method of making a diffusion bonded sputter target assembly is provided. A target blank comprising a first metal or alloy has a first surface defining a sputtering surface and a second surface. A second metal or alloy is placed around the target blank. A backing plate is provided adjacent the second metal or alloy that is positioned alongside of the second target surface. This assembly is then diffusion bonded, and a portion of the second metal overlying the sputtering surface of the target is removed to expose the target sputtering surface. W target or W alloy target/Ti or Ti alloy backing plate assemblies are provided with an Al inter-layer positioned intermediate the W or W alloy target and backing plate. The assembly has a bond strength exceeding 50 MPa.

Abstract: Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.

Abstract: Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.

Abstract: A non-planar sputter target having differing crystallographic orientations in portions of the sputter target surface that promote more desirable deposition and density patterns of material sputtered from the target surface onto a substrate. A closed dome end of the sputter target is comprised of a first crystallographic orientation and sidewalls of the sputter target are comprised of a crystallographic orientation different from that of the dome. The sputter target is formed, preferably by hydroforming or other metal working techniques, in the absence of annealing. The hydroforming manipulations result in the different crystallographic orientations while minimizing, or ideally omitting, the application of heat. Quick and cost effective non-planar sputter targets that are easily repeatably producable are achievable as a result.

Abstract: Aluminum or aluminum alloy sputter targets and methods of making same are provided. The pure aluminum or aluminum alloy is mechanically worked to produce a circular blank, and then the blank is given a recrystallization anneal to achieve desirable grain size and crystallographic texture. A 10-50% additional strain is provided to the blank step after the annealing to increase the mechanical strength. Further, in a flange area of the target, the strain is greater than in the other target areas with the strain in the flange area being imparted at a rate of about 20-60% strain. The blank is then finished to form a sputtering target with desirable crystallographic texture and adequate mechanical strength.

Abstract: The present invention generally provides a sputtering target comprising copper and a total of 0.001 wt %˜10 wt % alloying element or elements chosen from the group consisting of Al, Ag, Co, Cr, Ir, Fe, Mo, Ti, Pd, Ru, Ta, Sc, Hf, Zr, V, Nb, Y, and rare earth metals. An exemplary copper sputtering containing 0.5 wt % aluminum has superfine grain size, high thermal stability, and high electromigration resistance, and is able to form films with desired film uniformity, excellent resistance to electromigration and oxidation, and high adhesion to dielectric interlayer. An exemplary copper sputtering containing 12 ppm silver has superfine grain size. This invention also provides methods of manufacturing copper sputtering targets.

Abstract: A non-planar sputter target having differing crystallographic orientations in portions of the sputter target surface that promote more desirable deposition and density patterns of material sputtered from the target surface onto a substrate. A closed dome end of the sputter target is comprised of a first crystallographic orientation and sidewalls of the sputter target are comprised of a crystallographic orientation different from that of the dome. The sputter target is formed, preferably by hydroforming or other metal working techniques, in the absence of annealing. The hydroforming manipulations result in the different crystallographic orientations while minimizing, or ideally omitting, the application of heat. Quick and cost effective non-planar sputter targets that are easily repeatably producable are achievable as a result.