Abstract: Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

Abstract: A continuous metal building framing member may be cut and bent to form at least one wall member and at least one roofing member. The continuous metal building framing member may eliminate or reduce the use of web connector clips, rafter ties, and stud-to-rafter or top plate-to-rafter clip connections while expediting wall and roof assembly in light gauge cold formed steel framed building structures. The framing members may be specific pre-notched steel framing members, notched at predetermined bend locations, with remaining web and flange material to be structurally significant after bending, while simultaneously dictating points and extend of bending.