Patents by Inventor Robert S. Maxwell, IV

Robert S. Maxwell, IV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER CARRIER ASSEMBLY WITH PEDESTAL AND COVER RESTRAINT ARRANGEMENTS THAT CONTROL THERMAL GAPS
    Publication number: 20230060609
    Abstract: A wafer carrier assembly as described herein improves thermal control across a top surface thereof to maintain highly controlled deposition locations and thicknesses.
    Type: Application
    Filed: August 31, 2021
    Publication date: March 2, 2023
    Inventors: Sandeep Krishnan, Bojan Mitrovic, Eric A. Armour, Yuliy Rashkovsky, Robert S. Maxwell, IV, Matthew J. Van Doren