Patents by Inventor Robert S. Okojie

Robert S. Okojie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High temperature, pressure and displacement microsensor
    Patent number: 5637905
    Abstract: A high-temperature, integrated, pressure sensor includes a single crystal semiconductor substrate that is provided with a recess in a first surface thereof, the recess bounded by a rim. A first coil structure is positioned within the recess and a pressure diaphragm, comprising a single-crystal semiconductor wafer is bounded about its periphery to the rim of the semiconductor substrate. The bonding is created by a glass interlayer between the pressure diaphragm and the semiconductor substrate. A second coil structure is positioned on the underside of the pressure diaphragm and is separated from the first coil structure. Electrical circuitry is connected to both coil structures and provides an output indicative of changes in inductive coupling between the coils.
    Type: Grant
    Filed: February 1, 1996
    Date of Patent: June 10, 1997
    Assignee: New Jersey Institute of Technology
    Inventors: William N. Carr, Robert S. Okojie