Patents by Inventor Robert S. Zeller
Robert S. Zeller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20230347300Abstract: Described are porous, sintered inorganic bodies that include multiple layers made from different types of metal particles, that may be useful as filter membranes, and also to methods of making and using the porous, sintered inorganic bodies.Type: ApplicationFiled: April 28, 2023Publication date: November 2, 2023Inventors: Robert S. Zeller, Virendra Warke
-
Patent number: 11273492Abstract: Described are porous sintered metal bodies, methods of making and using the porous sintered metal bodies, and methods of using the porous sintered metal bodies for commercial applications that include filtering a fluid, including in applications requiring high efficiency (high LRV) filtration.Type: GrantFiled: November 2, 2018Date of Patent: March 15, 2022Assignee: ENTEGRIS, INC.Inventor: Robert S. Zeller
-
Publication number: 20210069792Abstract: Described are porous sintered metal bodies, methods of making and using the porous sintered metal bodies, and methods of using the porous sintered metal bodies for commercial applications that include filtering a fluid, including in applications requiring high efficiency (high LRV) filtration.Type: ApplicationFiled: November 2, 2018Publication date: March 11, 2021Inventor: Robert S. ZELLER
-
Patent number: 8932381Abstract: A porous membrane, comprising a blend of a first powder of metal particles of the first average size and a second powder of metal particles of a second average size, the first powder and the second powder sintered together. The first average size is five to fifty times greater than the second average size. The porous membrane comprises from 40% to 60% by weight of the first powder.Type: GrantFiled: June 16, 2010Date of Patent: January 13, 2015Assignee: Entegris, Inc.Inventor: Robert S. Zeller
-
Publication number: 20130305673Abstract: A sintered porous body made from a green compact of a flowable air laid mixture of metal particles and metal fibers is disclosed. The green compact is sintered to provide the porous sintered body with an isotropic distribution of metal particles and metal fibers throughout the matrix. The porous sintered body includes metal particles which act as nodes and are sintered to fibers and portions of fibers are sintered to other fibers.Type: ApplicationFiled: January 24, 2012Publication date: November 21, 2013Applicant: ENTEGRIS, INC.Inventor: Robert S. Zeller
-
Publication number: 20120079940Abstract: A porous membrane, comprising a blend of a first powder of metal particles of the first average size and a second powder of metal particles of a second average size, the first powder and the second powder sintered together. The first average size is five to fifty times greater than the second average size. The porous membrane comprises from 40% to 60% by weight of the first powder.Type: ApplicationFiled: June 16, 2010Publication date: April 5, 2012Inventor: Robert S. Zeller
-
Patent number: 7879137Abstract: A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.Type: GrantFiled: July 21, 2004Date of Patent: February 1, 2011Assignee: Entegris, Inc.Inventors: Bipin S. Parekh, Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes
-
Patent number: 7789940Abstract: A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.Type: GrantFiled: July 21, 2004Date of Patent: September 7, 2010Assignee: Entegris, Inc.Inventors: Bipin S. Parekh, Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes
-
Patent number: 6964693Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: March 31, 2003Date of Patent: November 15, 2005Assignee: Mykrolis CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 6770113Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: July 27, 2001Date of Patent: August 3, 2004Assignee: Mykrolis CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Publication number: 20030200834Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.Type: ApplicationFiled: March 31, 2003Publication date: October 30, 2003Applicant: Mykrolis CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 6623543Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: November 28, 2000Date of Patent: September 23, 2003Assignee: Mykrolis CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 6540809Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: November 28, 2000Date of Patent: April 1, 2003Assignee: Mykrolis CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Publication number: 20010049979Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.Type: ApplicationFiled: July 27, 2001Publication date: December 13, 2001Applicant: Mykrolis CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 6197085Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: October 8, 1998Date of Patent: March 6, 2001Assignee: Millipore CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 6193778Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: October 8, 1998Date of Patent: February 27, 2001Assignee: Millipore CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 5814272Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.Type: GrantFiled: February 21, 1996Date of Patent: September 29, 1998Assignee: Millipore CorporationInventors: Robert S. Zeller, Christopher J. Vroman
-
Patent number: 5487771Abstract: A high-porosity metallic membrane element comprising a sintered element having at least about 55% porosity, the sintered element comprising a matrix of substantially interconnected pores, each of the pores being defined by a plurality of dendtritic metallic particles. A preferred form is made from pure nickel, preferably filamentous nickel powder. The high-porosity metallic membrane element, comprising the aforementioned sintered element having at least about 55% porosity, can be sealed within a filter housing to produce a highly porous filter device with a filtered fluid flow path through the metal membrane element. Also disclosed is a method of making the high-porosity metallic membrane element which includes depositing by air-laying techniques a substantially uniform low-density bed of a sinterable dendritic material into a mold suitable for applying compressive force thereto, compressing the low-density bed of sinterable dendritic material to form a green form, and sintering the green form.Type: GrantFiled: July 27, 1994Date of Patent: January 30, 1996Assignee: Millipore CorporationInventor: Robert S. Zeller
-
Patent number: 5456740Abstract: A getter-filter composite membrane element, comprising a sinterable getter material and a sinterable metal filter material, the composite element defining a matrix of substantially interconnected pores. Membrane elements may be comprised of at least three alternating layers of a first sinterable getter material layer and a second sinterable metal filter material layer, the first getter layer being located between the second filter layers, the second layers acting to hold the getter layer, and to retain the getter particles. Also disclosed is a method of making the getter-filter element.Type: GrantFiled: June 22, 1994Date of Patent: October 10, 1995Assignee: Millipore CorporationInventors: James T. Snow, Walter Plante, Robert S. Zeller
-
Patent number: RE36249Abstract: A high-porosity metallic membrane element comprising a sintered element having at least about 55% porosity, the sintered element comprising a matrix of substantially interconnected pores, each of the pores being defined by a plurality of dendtritic metallic particles. A preferred form is made from pure nickel, preferably filamentous nickel powder. The high-porosity metallic membrane element, comprising the aforementioned sintered element having at least about 55% porosity, can be sealed within a filter housing to produce a highly porous filter device with a filtered fluid flow path through the metal membrane element. Also disclosed is a method of making the high-porosity metallic membrane element which includes depositing by air-laying techniques a substantially uniform low-density bed of a sinterable dendritic material into a mold suitable for applying compressive force thereto, compressing the low-density bed of sinterable dendritic material to form a green form, and sintering the green form.Type: GrantFiled: January 30, 1998Date of Patent: July 13, 1999Assignee: Millipore Investment Holdings, Inc.Inventor: Robert S. Zeller