Patents by Inventor Robert S. Zeller

Robert S. Zeller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230347300
    Abstract: Described are porous, sintered inorganic bodies that include multiple layers made from different types of metal particles, that may be useful as filter membranes, and also to methods of making and using the porous, sintered inorganic bodies.
    Type: Application
    Filed: April 28, 2023
    Publication date: November 2, 2023
    Inventors: Robert S. Zeller, Virendra Warke
  • Patent number: 11273492
    Abstract: Described are porous sintered metal bodies, methods of making and using the porous sintered metal bodies, and methods of using the porous sintered metal bodies for commercial applications that include filtering a fluid, including in applications requiring high efficiency (high LRV) filtration.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: March 15, 2022
    Assignee: ENTEGRIS, INC.
    Inventor: Robert S. Zeller
  • Publication number: 20210069792
    Abstract: Described are porous sintered metal bodies, methods of making and using the porous sintered metal bodies, and methods of using the porous sintered metal bodies for commercial applications that include filtering a fluid, including in applications requiring high efficiency (high LRV) filtration.
    Type: Application
    Filed: November 2, 2018
    Publication date: March 11, 2021
    Inventor: Robert S. ZELLER
  • Patent number: 8932381
    Abstract: A porous membrane, comprising a blend of a first powder of metal particles of the first average size and a second powder of metal particles of a second average size, the first powder and the second powder sintered together. The first average size is five to fifty times greater than the second average size. The porous membrane comprises from 40% to 60% by weight of the first powder.
    Type: Grant
    Filed: June 16, 2010
    Date of Patent: January 13, 2015
    Assignee: Entegris, Inc.
    Inventor: Robert S. Zeller
  • Publication number: 20130305673
    Abstract: A sintered porous body made from a green compact of a flowable air laid mixture of metal particles and metal fibers is disclosed. The green compact is sintered to provide the porous sintered body with an isotropic distribution of metal particles and metal fibers throughout the matrix. The porous sintered body includes metal particles which act as nodes and are sintered to fibers and portions of fibers are sintered to other fibers.
    Type: Application
    Filed: January 24, 2012
    Publication date: November 21, 2013
    Applicant: ENTEGRIS, INC.
    Inventor: Robert S. Zeller
  • Publication number: 20120079940
    Abstract: A porous membrane, comprising a blend of a first powder of metal particles of the first average size and a second powder of metal particles of a second average size, the first powder and the second powder sintered together. The first average size is five to fifty times greater than the second average size. The porous membrane comprises from 40% to 60% by weight of the first powder.
    Type: Application
    Filed: June 16, 2010
    Publication date: April 5, 2012
    Inventor: Robert S. Zeller
  • Patent number: 7879137
    Abstract: A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.
    Type: Grant
    Filed: July 21, 2004
    Date of Patent: February 1, 2011
    Assignee: Entegris, Inc.
    Inventors: Bipin S. Parekh, Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes
  • Patent number: 7789940
    Abstract: A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.
    Type: Grant
    Filed: July 21, 2004
    Date of Patent: September 7, 2010
    Assignee: Entegris, Inc.
    Inventors: Bipin S. Parekh, Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes
  • Patent number: 6964693
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: March 31, 2003
    Date of Patent: November 15, 2005
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6770113
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: July 27, 2001
    Date of Patent: August 3, 2004
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Publication number: 20030200834
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.
    Type: Application
    Filed: March 31, 2003
    Publication date: October 30, 2003
    Applicant: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6623543
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: September 23, 2003
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6540809
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: April 1, 2003
    Assignee: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Publication number: 20010049979
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.
    Type: Application
    Filed: July 27, 2001
    Publication date: December 13, 2001
    Applicant: Mykrolis Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6197085
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: October 8, 1998
    Date of Patent: March 6, 2001
    Assignee: Millipore Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 6193778
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: October 8, 1998
    Date of Patent: February 27, 2001
    Assignee: Millipore Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 5814272
    Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen. Another aspect of the present invention comprises the dendritic particles that are produced by the method described above. These particles can comprise any suitable metal, such as transition metals, rare earth metals, main group metals or metalloids or an alloy of two or more such metals. The particles can also comprise a ceramic material, such as a metal oxide. These particles are characterized by a dendritic, highly anisotropic, morphology arising from the fusion of substantially non-dendritic particles, and by a low apparent density relative to the substantially non-dendritic starting material.
    Type: Grant
    Filed: February 21, 1996
    Date of Patent: September 29, 1998
    Assignee: Millipore Corporation
    Inventors: Robert S. Zeller, Christopher J. Vroman
  • Patent number: 5487771
    Abstract: A high-porosity metallic membrane element comprising a sintered element having at least about 55% porosity, the sintered element comprising a matrix of substantially interconnected pores, each of the pores being defined by a plurality of dendtritic metallic particles. A preferred form is made from pure nickel, preferably filamentous nickel powder. The high-porosity metallic membrane element, comprising the aforementioned sintered element having at least about 55% porosity, can be sealed within a filter housing to produce a highly porous filter device with a filtered fluid flow path through the metal membrane element. Also disclosed is a method of making the high-porosity metallic membrane element which includes depositing by air-laying techniques a substantially uniform low-density bed of a sinterable dendritic material into a mold suitable for applying compressive force thereto, compressing the low-density bed of sinterable dendritic material to form a green form, and sintering the green form.
    Type: Grant
    Filed: July 27, 1994
    Date of Patent: January 30, 1996
    Assignee: Millipore Corporation
    Inventor: Robert S. Zeller
  • Patent number: 5456740
    Abstract: A getter-filter composite membrane element, comprising a sinterable getter material and a sinterable metal filter material, the composite element defining a matrix of substantially interconnected pores. Membrane elements may be comprised of at least three alternating layers of a first sinterable getter material layer and a second sinterable metal filter material layer, the first getter layer being located between the second filter layers, the second layers acting to hold the getter layer, and to retain the getter particles. Also disclosed is a method of making the getter-filter element.
    Type: Grant
    Filed: June 22, 1994
    Date of Patent: October 10, 1995
    Assignee: Millipore Corporation
    Inventors: James T. Snow, Walter Plante, Robert S. Zeller
  • Patent number: RE36249
    Abstract: A high-porosity metallic membrane element comprising a sintered element having at least about 55% porosity, the sintered element comprising a matrix of substantially interconnected pores, each of the pores being defined by a plurality of dendtritic metallic particles. A preferred form is made from pure nickel, preferably filamentous nickel powder. The high-porosity metallic membrane element, comprising the aforementioned sintered element having at least about 55% porosity, can be sealed within a filter housing to produce a highly porous filter device with a filtered fluid flow path through the metal membrane element. Also disclosed is a method of making the high-porosity metallic membrane element which includes depositing by air-laying techniques a substantially uniform low-density bed of a sinterable dendritic material into a mold suitable for applying compressive force thereto, compressing the low-density bed of sinterable dendritic material to form a green form, and sintering the green form.
    Type: Grant
    Filed: January 30, 1998
    Date of Patent: July 13, 1999
    Assignee: Millipore Investment Holdings, Inc.
    Inventor: Robert S. Zeller