Patents by Inventor Robert Schanzer

Robert Schanzer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device contamination reduction in a fluorinated oxide deposition process
    Publication number: 20050191863
    Abstract: A method for improving throughput in a semiconductor wafer deposition process in a high density plasma chamber includes processing a first wafer in the high density plasma chamber using a process that includes high power sufficient to burn fluorosilicate glass residue in the chamber. The method further includes removing the first wafer and processing additional wafers using the same process without cleaning the chamber between wafers.
    Type: Application
    Filed: January 20, 2005
    Publication date: September 1, 2005
    Inventors: Leonard Olmer, Thomas Lahey, Timothy Campbell, Robert Schanzer, David Shuttleworth
  • Jewelry
    Patent number: D684498
    Type: Grant
    Filed: March 15, 2012
    Date of Patent: June 18, 2013
    Inventor: Michael Robert Schanzer