Abstract: A bolometer type focal plane is made up of a plurality of silicon sensors. Within each sensor, interconnection between co-planar stages is provided by elongated “I” beam type bridge members having a generally rectangular cross-section including unequal wider (height) and narrower (width) dimensions, and wherein the bridge members are oriented such that the narrower width dimension is in the direction of the common plane and the wider height dimension is perpendicular to the common plane. A sensor with these bridges accommodates stress/strain by rotation while preventing out-of-plane deflection and deformation.

Abstract: A bolometer type focal plane is made up of a plurality of silicon sensors. Within each sensor, interconnection between co-planar stages is provided by elongated “I” beam type bridge members having a generally rectangular cross-section including unequal wider (height) and narrower (width) dimensions, and wherein the bridge members are oriented such that the narrower width dimension is in the direction of the common plane and the wider height dimension is perpendicular to the common plane. A sensor with these bridges accommodates stress/strain by rotation while preventing out-of-plane deflection and deformation.

Abstract: A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected.