Patents by Inventor Robert Stoner
Robert Stoner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9025162Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.Type: GrantFiled: August 13, 2009Date of Patent: May 5, 2015Assignee: Zygo CorporationInventors: Xavier Colonna de Lega, Robert Stoner, Peter de Groot
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Patent number: 7948636Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.Type: GrantFiled: February 8, 2010Date of Patent: May 24, 2011Assignee: Zygo CorporationInventors: Peter De Groot, Michael J Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
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Patent number: 7889355Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.Type: GrantFiled: June 4, 2007Date of Patent: February 15, 2011Assignee: Zygo CorporationInventors: Xavier Colonna De Lega, Robert Stoner, Peter De Groot
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Publication number: 20100265516Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.Type: ApplicationFiled: February 8, 2010Publication date: October 21, 2010Inventors: Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
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Patent number: 7684049Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.Type: GrantFiled: January 22, 2008Date of Patent: March 23, 2010Assignee: Zygo CorporationInventors: Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
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Publication number: 20090303493Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.Type: ApplicationFiled: August 13, 2009Publication date: December 10, 2009Applicant: ZYGO CORPORATIONInventors: Xavier Colonna de Lega, Robert Stoner, Peter de Groot
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Patent number: 7466429Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.Type: GrantFiled: June 26, 2007Date of Patent: December 16, 2008Assignee: Zygo CorporationInventors: Peter J. de Groot, Robert Stoner, Xavier Colonna de Lega
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Publication number: 20080266574Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.Type: ApplicationFiled: January 22, 2008Publication date: October 30, 2008Inventors: Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
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Publication number: 20080180685Abstract: A method is disclosed which includes: using a scanning interferons dry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.Type: ApplicationFiled: June 4, 2007Publication date: July 31, 2008Applicant: Zygo CorporationInventors: XAVIER COLONNA DE LEGA, Robert Stoner, Peter De Groot
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Publication number: 20080065350Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.Type: ApplicationFiled: June 26, 2007Publication date: March 13, 2008Inventors: Peter de Groot, Robert Stoner, Xavier de Lega
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Patent number: 7271918Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.Type: GrantFiled: March 8, 2004Date of Patent: September 18, 2007Assignee: Zygo CorporationInventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
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Patent number: 7239398Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.Type: GrantFiled: September 12, 2006Date of Patent: July 3, 2007Assignee: Zygo CorporationInventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
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Publication number: 20070097380Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.Type: ApplicationFiled: September 12, 2006Publication date: May 3, 2007Inventors: Peter De Groot, Robert Stoner, Xavier De Lega
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Publication number: 20070046953Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.Type: ApplicationFiled: September 21, 2006Publication date: March 1, 2007Inventors: Peter De Groot, Michael Darwin, Robert Stoner, Gregg Gallatin, Xavier De Lega
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Patent number: 7106454Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.Type: GrantFiled: March 8, 2004Date of Patent: September 12, 2006Assignee: Zygo CorporationInventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
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Publication number: 20050073692Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.Type: ApplicationFiled: March 8, 2004Publication date: April 7, 2005Inventors: Peter De Groot, Robert Stoner, Xavier De Lega
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Publication number: 20040189999Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.Type: ApplicationFiled: March 8, 2004Publication date: September 30, 2004Inventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
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Publication number: 20040111471Abstract: A Network Alarm Monitoring System for monitoring messages generated by network elements that provides for a great degree of configuration and reliability. Via a display interface, e.g., Web-based or otherwise, clients may create and configure text-based rules for monitoring alarms. These rules are applied to specify which actions are to be taken on which messages, based on designated field values of alarm messages. Actions include writing messages to an alarm database, sending messages to downstream network management systems, triggering an e-mail or page. Furthermore, remote access to the network element being monitored is provided.Type: ApplicationFiled: December 3, 2003Publication date: June 10, 2004Applicant: WorldCom, Inc.Inventors: Robert Stoner, Matthew Griego, Glen Manas