Patents by Inventor Robert Stoner

Robert Stoner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9025162
    Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
    Type: Grant
    Filed: August 13, 2009
    Date of Patent: May 5, 2015
    Assignee: Zygo Corporation
    Inventors: Xavier Colonna de Lega, Robert Stoner, Peter de Groot
  • Patent number: 7948636
    Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: May 24, 2011
    Assignee: Zygo Corporation
    Inventors: Peter De Groot, Michael J Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
  • Patent number: 7889355
    Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
    Type: Grant
    Filed: June 4, 2007
    Date of Patent: February 15, 2011
    Assignee: Zygo Corporation
    Inventors: Xavier Colonna De Lega, Robert Stoner, Peter De Groot
  • Publication number: 20100265516
    Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
    Type: Application
    Filed: February 8, 2010
    Publication date: October 21, 2010
    Inventors: Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
  • Patent number: 7684049
    Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: March 23, 2010
    Assignee: Zygo Corporation
    Inventors: Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
  • Publication number: 20090303493
    Abstract: A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
    Type: Application
    Filed: August 13, 2009
    Publication date: December 10, 2009
    Applicant: ZYGO CORPORATION
    Inventors: Xavier Colonna de Lega, Robert Stoner, Peter de Groot
  • Patent number: 7466429
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
    Type: Grant
    Filed: June 26, 2007
    Date of Patent: December 16, 2008
    Assignee: Zygo Corporation
    Inventors: Peter J. de Groot, Robert Stoner, Xavier Colonna de Lega
  • Publication number: 20080266574
    Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
    Type: Application
    Filed: January 22, 2008
    Publication date: October 30, 2008
    Inventors: Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega
  • Publication number: 20080180685
    Abstract: A method is disclosed which includes: using a scanning interferons dry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
    Type: Application
    Filed: June 4, 2007
    Publication date: July 31, 2008
    Applicant: Zygo Corporation
    Inventors: XAVIER COLONNA DE LEGA, Robert Stoner, Peter De Groot
  • Publication number: 20080065350
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
    Type: Application
    Filed: June 26, 2007
    Publication date: March 13, 2008
    Inventors: Peter de Groot, Robert Stoner, Xavier de Lega
  • Patent number: 7271918
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: September 18, 2007
    Assignee: Zygo Corporation
    Inventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
  • Patent number: 7239398
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
    Type: Grant
    Filed: September 12, 2006
    Date of Patent: July 3, 2007
    Assignee: Zygo Corporation
    Inventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
  • Publication number: 20070097380
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
    Type: Application
    Filed: September 12, 2006
    Publication date: May 3, 2007
    Inventors: Peter De Groot, Robert Stoner, Xavier De Lega
  • Publication number: 20070046953
    Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
    Type: Application
    Filed: September 21, 2006
    Publication date: March 1, 2007
    Inventors: Peter De Groot, Michael Darwin, Robert Stoner, Gregg Gallatin, Xavier De Lega
  • Patent number: 7106454
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: September 12, 2006
    Assignee: Zygo Corporation
    Inventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
  • Publication number: 20050073692
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
    Type: Application
    Filed: March 8, 2004
    Publication date: April 7, 2005
    Inventors: Peter De Groot, Robert Stoner, Xavier De Lega
  • Publication number: 20040189999
    Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
    Type: Application
    Filed: March 8, 2004
    Publication date: September 30, 2004
    Inventors: Peter J. De Groot, Robert Stoner, Xavier Colonna De Lega
  • Publication number: 20040111471
    Abstract: A Network Alarm Monitoring System for monitoring messages generated by network elements that provides for a great degree of configuration and reliability. Via a display interface, e.g., Web-based or otherwise, clients may create and configure text-based rules for monitoring alarms. These rules are applied to specify which actions are to be taken on which messages, based on designated field values of alarm messages. Actions include writing messages to an alarm database, sending messages to downstream network management systems, triggering an e-mail or page. Furthermore, remote access to the network element being monitored is provided.
    Type: Application
    Filed: December 3, 2003
    Publication date: June 10, 2004
    Applicant: WorldCom, Inc.
    Inventors: Robert Stoner, Matthew Griego, Glen Manas