Patents by Inventor Robert T. Caveney

Robert T. Caveney has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210066105
    Abstract: A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.
    Type: Application
    Filed: August 18, 2020
    Publication date: March 4, 2021
    Inventor: Robert T. Caveney
  • Publication number: 20210043494
    Abstract: A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.
    Type: Application
    Filed: October 27, 2020
    Publication date: February 11, 2021
    Inventors: Robert T. CAVENEY, Ulysses Gilchrist
  • Publication number: 20210023698
    Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
    Type: Application
    Filed: August 11, 2020
    Publication date: January 28, 2021
    Inventors: Robert T. Caveney, Alexander G. KRUPYSHEV, Martin R. ELLIOT, Christopher HOFMEISTER
  • Publication number: 20200361706
    Abstract: An automated cryogenic storage system includes a freezer and an automation system to provide automated transfer of samples to and from the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to a rack carrier inside the freezer and adapted to be coupled to a motor. The automation module includes a rack puller that is automatically positioned above an access port of the freezer. The rack puller engages with a sample rack within the freezer, and elevates the rack into an insulating sleeve external to the freezer. From the insulating sleeve, samples can be added to and removed from the sample rack before it is returned to the freezer.
    Type: Application
    Filed: May 1, 2020
    Publication date: November 19, 2020
    Inventors: Robert T. Caveney, Frank Hunt, Lingchen Sun, Julian D. Warhurst, Bruce S. Zandi, Anthony C. Bonora
  • Patent number: 10818537
    Abstract: A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.
    Type: Grant
    Filed: February 11, 2019
    Date of Patent: October 27, 2020
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Ulysses Gilchrist
  • Publication number: 20200321232
    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
    Type: Application
    Filed: March 20, 2020
    Publication date: October 8, 2020
    Inventors: Robert T. CAVENEY, Jayaraman KRISHNASAMY, Ulysses GILCHRIST, Mitchell DREW, Jairo MOURA
  • Patent number: 10777438
    Abstract: In accordance with one or more aspects of the disclosed embodiment a semiconductor processing apparatus is provided. The semiconductor processing apparatus includes a frame forming a sealable chamber having a longitudinal axis and lateral sides astride the longitudinal axis, the sealable chamber being configured to hold a sealed environment therein, at least one transport module mounted to the sealable chamber and having a telescoping carriage being configured so that the telescoping carriage is linearly movable relative to another portion of the transport module where the telescoping carriage and the other portion define a telescoping motion along the longitudinal axis, and at least one transfer robot mounted to the carriage, each of the at least one transfer robot having at least one transfer arm configured for holding a substrate thereon.
    Type: Grant
    Filed: October 16, 2014
    Date of Patent: September 15, 2020
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Ulysses Gilchrist
  • Publication number: 20200273734
    Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
    Type: Application
    Filed: May 12, 2020
    Publication date: August 27, 2020
    Inventors: Jairo T. MOURA, Robert T. CAVENEY, Bing YIN, Nathan SPIKER, Vincent W. TSANG
  • Patent number: 10748799
    Abstract: A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: August 18, 2020
    Assignee: Brooks Automation, Inc.
    Inventor: Robert T. Caveney
  • Patent number: 10737381
    Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: August 11, 2020
    Assignee: Brooks Automation, Inc.
    Inventors: Robert T. Caveney, Alexander G. Krupyshev, Martin R. Elliot, Christopher Hofmeister
  • Patent number: 10661990
    Abstract: An automated cryogenic storage system includes a freezer and an automation system to provide automated transfer of samples to and from the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to a rack carrier inside the freezer and adapted to be coupled to a motor. The automation module includes a rack puller that is automatically positioned above an access port of the freezer. The rack puller engages with a sample rack within the freezer, and elevates the rack into an insulating sleeve external to the freezer. From the insulating sleeve, samples can be added to and removed from the sample rack before it is returned to the freezer.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: May 26, 2020
    Assignee: BROOKS AUTOMATION, INC.
    Inventors: Robert T. Caveney, Frank Hunt, Lingchen Sun, Julian D. Warhurst, Bruce S. Zandi, Anthony C. Bonora
  • Publication number: 20200161153
    Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.
    Type: Application
    Filed: August 27, 2019
    Publication date: May 21, 2020
    Inventors: Daniel Babbs, Robert T. Caveney, Robert C. May, Krysztof A. Majczak
  • Publication number: 20200161152
    Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 21, 2020
    Inventors: Robert T. Caveney, Ulysses Gilchrist, Alexander Krupyshev
  • Patent number: 10651067
    Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
    Type: Grant
    Filed: January 25, 2018
    Date of Patent: May 12, 2020
    Assignee: BROOKS AUTOMATION, INC.
    Inventors: Jairo T. Moura, Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang
  • Publication number: 20200144087
    Abstract: A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260° C. for a specified predetermined service period.
    Type: Application
    Filed: October 30, 2019
    Publication date: May 7, 2020
    Inventors: Daniel BABBS, Robert Chris May, Robert T. Caveney
  • Publication number: 20200122316
    Abstract: A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.
    Type: Application
    Filed: October 3, 2019
    Publication date: April 23, 2020
    Inventors: Vincent W. Tsang, Robert T. Caveney
  • Publication number: 20200101598
    Abstract: A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.
    Type: Application
    Filed: December 3, 2019
    Publication date: April 2, 2020
    Inventor: Robert T. CAVENEY
  • Patent number: 10600665
    Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
    Type: Grant
    Filed: June 18, 2019
    Date of Patent: March 24, 2020
    Assignee: BROOKS AUTOMATION, INC.
    Inventors: Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura
  • Publication number: 20200062501
    Abstract: A configurable cryogenic storage device has a freezer and a rack carrier positioned inside of the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to the rack carrier inside the freezer and adapted to be coupled to a motor assembly. The rack carrier rests on the bearing in a manual rotation configuration and hangs from the drive shaft when the motor is connected. Coupling the drive shaft to the motor assembly lifts the rack carrier and decouples the bearing and enables automated rotation of the rack carrier by the motor. The rack carrier includes rack-mounting features holding a plurality of sample storage racks. The sample storage racks hang from the rack carrier and the rack-mounting features precisely position the end of each sample storage rack.
    Type: Application
    Filed: September 23, 2019
    Publication date: February 27, 2020
    Inventors: Robert T. Caveney, Frank Hunt, Lingchen Sun, Julian D. Warhurst, Bruce S. Zandi, Jeffrey S. Brooks
  • Publication number: 20200067368
    Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
    Type: Application
    Filed: November 5, 2019
    Publication date: February 27, 2020
    Inventors: Jairo T. MOURA, Ulysses GILCHRIST, Robert T. CAVENEY