Patents by Inventor Robert T. Soter

Robert T. Soter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR FORMING PATTERNED TANTALUM NITRIDE (TaN) RESISTORS ON DIELECTRIC MATERIAL PASSIVATION LAYERS
    Publication number: 20180019298
    Abstract: A structure having: a substrate; a passivation layer disposed over a surface of substrate; an etch stop layer disposed on the passivation layer; resistor comprising tantalum nitride, disposed on the etch stop layer. The etch stop layer has an etch rate at least 100 times slower than an etch rate of the tantalum nitride to a predetermined etchant.
    Type: Application
    Filed: July 18, 2016
    Publication date: January 18, 2018
    Applicant: Raytheon Company
    Inventors: Kiuchul Hwang, Robert T. Soter, Bruce Leblanc, Adrian D. Williams