Patents by Inventor Robert T Stoner

Robert T Stoner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Interferometer and method for measuring characteristics of optically unresolved surface features
    Patent number: 7324214
    Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
    Type: Grant
    Filed: September 21, 2006
    Date of Patent: January 29, 2008
    Assignee: Zygo Corporation
    Inventors: Peter De Groot, Michael J Darwin, Robert T Stoner, Gregg M. Gallatin, Xavier Colonna De Lega