Patents by Inventor Robert Tharaldsen

Robert Tharaldsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 9594030
    Abstract: An apparatus and a method to detect a defect or particle on a surface that involves combining an object radiation beam redirected by the surface with a reference radiation beam having a plurality of intensities lower than the object radiation beam, to produce a plurality of patterns detected by a detector in order to detect the defect or particle on the surface from the patterns.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: March 14, 2017
    Assignee: ASML HOLDING N.V.
    Inventors: Yuli Vladimirsky, Robert Tharaldsen
  • WHITE CELL FOR FLUID DETECTION
    Publication number: 20150062572
    Abstract: An optical absorption spectroscopy apparatus includes a field mirror and at least one object mirror configured to reflect transmitted light multiple times between the field minor and the at least one object mirror through a sample volume. At least one fold mirror is configured to allow the transmitted light to double pass across the field mirror. The apparatus can further include a light source and a detector configured to detect an optical absorption spectrum of the light transmitted from the light source through a sample volume.
    Type: Application
    Filed: February 20, 2014
    Publication date: March 5, 2015
    Inventors: Robert Tharaldsen, Malcolm J. MacFarlane, Kenneth Bycenski
  • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20140264054
    Abstract: An apparatus and a method to detect a defect or particle on a surface that involves combining an object radiation beam redirected by the surface with a reference radiation beam having a plurality of intensities lower than the object radiation beam, to produce a plurality of patterns detected by a detector in order to detect the defect or particle on the surface from the patterns.
    Type: Application
    Filed: September 14, 2012
    Publication date: September 18, 2014
    Applicant: ASML Holding N.V.
    Inventors: Yuli Vladimirsky, Robert Tharaldsen