Patents by Inventor Robert V. Terhune

Robert V. Terhune has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming patterns in substrates
    Patent number: 7455938
    Abstract: The invention includes methods of forming a pattern in a substrate. A feature location is defined where a square corner is desired to be patterned into the substrate. A mask is generated which is to be utilized in creating a substantially square corner at the feature location. The mask has a linear sub-resolution component extending across the feature location. Radiation is provided through the mask to pattern the substantially square corner at the feature location.
    Type: Grant
    Filed: April 1, 2005
    Date of Patent: November 25, 2008
    Assignee: Micron Technology, Inc.
    Inventor: Robert V. Terhune