Abstract: This process models production integrated processing equipment, also known as cluster tools, modular equipment, track systems, etc. Further, the model produced by this invention is a real-world model, i.e., it is realistic and validatable. In addition, the invention provides a process for developing machine-specific implementations for PIPEs performing such complex processes as plasma etching, plasma deposition, chemical-vapor deposition, physical-vapor deposition, photolithography, photo-resist processing, rapid thermal processing, and oxidation, as well as other processes. The PIPE-specific model can be used for performance analysis. The effect of changes in process times, process recipes, and process mixtures on cycle time, throughput, resource utilization, and bottlenecks can be analyzed. These PIPE models may be used in the design or redesign of PIPEs. Further, the PIPE-specific model can be used to control material movement in the PIPE, including buffer dynamics to avoid machine lock-up.

Abstract: A modeling and control process for distributed factories having fabrication sequences starts with a definition of how the factory actually operates, rather than a mathematical theory which ultimately leads to a definition of the plant operation. The process begins by delineating a set of factory operating rules which define how part lots interact with machines in actual operation of the factory. A dynamic model of the factory is selected from a group of specimen models for such factories. The model defines the factory by its machines, products, fabrication sequences, collections of job sets, scheduling rules, and machine reliability parameters. The parameters that describe the specific factory are determined and defined in terms of data structures of the individual factory model. The factory specific model contains descriptions of the dynamic interactions of lots and machines. The behavior of the factory can be simulated in detail.