Abstract: A plasma gun is described which is capable of creating and directing a plasma towards a neutralizing plate. The plate is comprised of a material which is chemically inert, metallic, and whose atoms are substantially heavier than the atoms of the plasma gas. The plasma, upon impacting the neutralizing plate, picks up sufficient electrons to cause the ions to revert to their neutral state. The particles, upon hitting the neutralizing plate, are redirected towards a substrate whose surface is to be altered or eroded. A potential may be applied to the neutralizing plate to enable the energy of the reflected particles to be controlled. The neutral atoms, so redirected, provide a desired anisotropic erosion capability.

Abstract: A device for coupling RF power (a plasma sweeper) from a phased waveguide array for introducing RF power to a plasma having a magnetic field associated therewith comprises at least one electrode positioned near the plasma and near the phased waveguide array; and a potential source coupled to the electrode for generating a static electric field at the electrode directed into the plasma and having a component substantially perpendicular to the plasma magnetic field such that a non-zero vector cross-product of the electric and magnetic fields exerts a force on the plasma causing the plasma to drift.