Patents by Inventor Robert W. Walsh
Robert W. Walsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8928895Abstract: Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.Type: GrantFiled: October 1, 2010Date of Patent: January 6, 2015Assignee: KLA-Tencor CorporationInventors: Michael J. Wright, Robert W. Walsh, Daniel L. Belin, David S. Alles
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Publication number: 20110019206Abstract: Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.Type: ApplicationFiled: October 1, 2010Publication date: January 27, 2011Applicant: KLA-TENCOR CORPORATIONInventors: Michael J. Wright, Robert W. Walsh, Daniel L. Belin, David S. Alles
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Patent number: 7835015Abstract: Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.Type: GrantFiled: March 4, 2008Date of Patent: November 16, 2010Assignee: KLA-Tencor CorporationInventors: Michael J. Wright, Robert W. Walsh, Daniel L. Belin, David S. Alles
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Patent number: 7486393Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.Type: GrantFiled: July 30, 2007Date of Patent: February 3, 2009Assignee: KLA-TencorInventors: Damon F. Kvamme, Robert W. Walsh
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Patent number: 7352457Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.Type: GrantFiled: May 23, 2006Date of Patent: April 1, 2008Assignee: KLA-Tencor CorporationInventors: Damon F. Kvamme, Robert W. Walsh
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Patent number: 7216092Abstract: A system and method for facilitating the creation of personalized products is disclosed, wherein a user on a user computer can access a host merchant computer via a communication network, such as the Internet. The host merchant computer communicates with a products database containing information on products available for personalization and further contains manufacturing capabilities for the products.Type: GrantFiled: April 14, 2000Date of Patent: May 8, 2007Assignee: Deluxe CorporationInventors: Richard C. Weber, Kevin D. Malone, Krishna Narayan, Anthony F. Novalany, David M. Belseth, John J. Herlihy, Fred H. Squires, Michael N. Sax, Robert W. Walsh
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Patent number: 7075638Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.Type: GrantFiled: March 8, 2005Date of Patent: July 11, 2006Assignee: KLA-Tenor Technologies CorporationInventors: Damon F. Kvamme, Robert W. Walsh
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Patent number: 6879390Abstract: Disclosed in an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.Type: GrantFiled: August 10, 2000Date of Patent: April 12, 2005Assignee: KLA-Tencor Technologies CorporationInventors: Damon F. Kvamme, Robert W. Walsh
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Patent number: 6636301Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The inspection system includes a light source for emitting a light beam along an optical axis and a first set of optical elements arranged for separating the light beam into a plurality of light beams, directing the plurality of light beams to intersection with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system also includes a second set of optical elements adapted for collecting a plurality of transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate and a light detector arrangement including individual light detectors that each receive individual ones of the plurality of transmitted light beams. The light detectors are arranged for sensing the light intensity of the transmitted light beams.Type: GrantFiled: August 10, 2000Date of Patent: October 21, 2003Assignee: KLA-Tencor CorporationInventors: Damon F. Kvamme, Robert W. Walsh