Patents by Inventor Robert W. Walsh

Robert W. Walsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8928895
    Abstract: Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.
    Type: Grant
    Filed: October 1, 2010
    Date of Patent: January 6, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Michael J. Wright, Robert W. Walsh, Daniel L. Belin, David S. Alles
  • Publication number: 20110019206
    Abstract: Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.
    Type: Application
    Filed: October 1, 2010
    Publication date: January 27, 2011
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Michael J. Wright, Robert W. Walsh, Daniel L. Belin, David S. Alles
  • Patent number: 7835015
    Abstract: Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.
    Type: Grant
    Filed: March 4, 2008
    Date of Patent: November 16, 2010
    Assignee: KLA-Tencor Corporation
    Inventors: Michael J. Wright, Robert W. Walsh, Daniel L. Belin, David S. Alles
  • Patent number: 7486393
    Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: February 3, 2009
    Assignee: KLA-Tencor
    Inventors: Damon F. Kvamme, Robert W. Walsh
  • Patent number: 7352457
    Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: April 1, 2008
    Assignee: KLA-Tencor Corporation
    Inventors: Damon F. Kvamme, Robert W. Walsh
  • Patent number: 7216092
    Abstract: A system and method for facilitating the creation of personalized products is disclosed, wherein a user on a user computer can access a host merchant computer via a communication network, such as the Internet. The host merchant computer communicates with a products database containing information on products available for personalization and further contains manufacturing capabilities for the products.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: May 8, 2007
    Assignee: Deluxe Corporation
    Inventors: Richard C. Weber, Kevin D. Malone, Krishna Narayan, Anthony F. Novalany, David M. Belseth, John J. Herlihy, Fred H. Squires, Michael N. Sax, Robert W. Walsh
  • Patent number: 7075638
    Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: July 11, 2006
    Assignee: KLA-Tenor Technologies Corporation
    Inventors: Damon F. Kvamme, Robert W. Walsh
  • Patent number: 6879390
    Abstract: Disclosed in an optical inspection system for inspecting the surface of a substrate. The optical inspection system includes a light source for emitting an incident light beam along an optical axis and a first set of optical elements arranged for separating the incident light beam into a plurality of light beams, directing the plurality of light beams to intersect with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system further includes a light detector arrangement including individual light detectors that correspond to individual ones of a plurality of reflected or transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate. The light detectors are arranged for sensing the light intensity of either the reflected or transmitted light.
    Type: Grant
    Filed: August 10, 2000
    Date of Patent: April 12, 2005
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Damon F. Kvamme, Robert W. Walsh
  • Patent number: 6636301
    Abstract: Disclosed is an optical inspection system for inspecting the surface of a substrate. The inspection system includes a light source for emitting a light beam along an optical axis and a first set of optical elements arranged for separating the light beam into a plurality of light beams, directing the plurality of light beams to intersection with the surface of the substrate, and focusing the plurality of light beams to a plurality of scanning spots on the surface of the substrate. The inspection system also includes a second set of optical elements adapted for collecting a plurality of transmitted light beams caused by the intersection of the plurality of light beams with the surface of the substrate and a light detector arrangement including individual light detectors that each receive individual ones of the plurality of transmitted light beams. The light detectors are arranged for sensing the light intensity of the transmitted light beams.
    Type: Grant
    Filed: August 10, 2000
    Date of Patent: October 21, 2003
    Assignee: KLA-Tencor Corporation
    Inventors: Damon F. Kvamme, Robert W. Walsh