Patents by Inventor Robert WILLONER

Robert WILLONER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition tool and method for filling deep trenches
    Patent number: 12341065
    Abstract: The present disclosure is directed to semiconductor deposition tools having a specimen support, at least one ion gun directed to a specimen positioned on the specimen support, at least one source, and at least one electron beam gun directed at the source. In an aspect, the electron beam guns, sources, and ion beam guns are positioned below the specimen support and specimen positioned thereon, which has its top surface facing downward. In another aspect, the method includes activating the electron beam gun and depositing the source material in a trench in the specimen and on surfaces adjacent to the opening of the trench and activating the ion beam gun to remove portions of the source material deposited on the surfaces adjacent to the opening of the trench.
    Type: Grant
    Filed: May 6, 2022
    Date of Patent: June 24, 2025
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Matthew Metz, Robert Willoner
  • DEPOSITION TOOL AND METHOD FOR FILLING DEEP TRENCHES
    Publication number: 20230360970
    Abstract: The present disclosure is directed to semiconductor deposition tools having a specimen support, at least one ion gun directed to a specimen positioned on the specimen support, at least one source, and at least one electron beam gun directed at the source. In an aspect, the electron beam guns, sources, and ion beam guns are positioned below the specimen support and specimen positioned thereon, which has its top surface facing downward. In another aspect, the method includes activating the electron beam gun and depositing the source material in a trench in the specimen and on surfaces adjacent to the opening of the trench and activating the ion beam gun to remove portions of the source material deposited on the surfaces adjacent to the opening of the trench.
    Type: Application
    Filed: May 6, 2022
    Publication date: November 9, 2023
    Inventors: Elijah V. KARPOV, Matthew METZ, Robert WILLONER