Patents by Inventor Robert Wong Joek Meu HUANG FOEN CHUNG

Robert Wong Joek Meu HUANG FOEN CHUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE
    Publication number: 20230017894
    Abstract: A flood column for charged particle flooding of a sample, the flood column comprising a charged particle source configured to emit a charged particle beam along a beam path; a source lens arranged down-beam of the charged particle source; a condenser lens arranged down-beam of the source lens; and an aperture body arranged down-beam of the condenser lens, wherein the aperture body is for passing a portion of the charged particle beam; and wherein the source lens is controllable so as to variably set the beam angle of the charged particle beam down-beam of the source lens.
    Type: Application
    Filed: September 23, 2022
    Publication date: January 19, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Jurgen VAN SOEST, Gun Sara Mari BERGLUND, Robert Wong Joek Meu HUANG FOEN CHUNG, Diego MARTINEZ NEGRETE GASQUE, Laura DINU GURTLER