Patents by Inventor Roberto COTLEAR

Roberto COTLEAR has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ENDPOINT GAS LINE FILTER FOR SUBSTRATE PROCESSING EQUIPMENT
    Publication number: 20180122655
    Abstract: Methods and apparatus for delivering one or more gases to a process chamber are provided herein. In some embodiments a gas delivery system includes a process chamber having an inner volume; a gas source panel; a gas line coupling the inner volume to the gas source panel; and a first gas filter disposed along the gas line proximate the inner volume, wherein the first gas filter comprises a filter element body having a first end and a second end opposite the first end, and a filtration efficiency of about 1 to about 5 log reduction value (LRV).
    Type: Application
    Filed: October 16, 2017
    Publication date: May 3, 2018
    Inventors: Vahid FIROUZDOR, Roberto COTLEAR, Michael NICHOLS, Imad YOUSIF, Steven E. BABAYAN, Rajinder DHINDSA, Changhun LEE