Patents by Inventor Roberto Longo Pazos

Roberto Longo Pazos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240186149
    Abstract: A substrate processing method including: providing a substrate containing an etch mask over a metallic molybdenum layer in a recessed feature; exposing the substrate to a plasma-excited deposition gas that forms an etch protection layer on a sidewall of the recessed feature; and exposing the substrate to a plasma-excited etching gas that etches the metallic molybdenum layer according to the etch mask, where the exposing steps are alternatingly performed a plurality of times.
    Type: Application
    Filed: December 6, 2022
    Publication date: June 6, 2024
    Inventors: Yun Han, Peter Lowell George Ventzek, Roberto Longo Pazos, Alok Ranjan