Abstract: A microelectromechanical systems (MEMS) device and methods for its fabrication are disclosed. The MEMS device includes a processing layer having processing circuitry and a plurality of bond pads and a MEMS layer bonded to the processing layer. Signals generated by a MEMS component are processed by the circuitry and routed through a plurality of electrical connections extending vertically from the bond pads to a redistribution layer and a plurality of solderable pads that define external contact points for direct electrical bonding to external circuitry. The MEMS and processing layers, along with the electrical connections, are encapsulated in an overmold with the solderable pads exposed at a substantially planar package surface.

Abstract: A dual axis accelerometer with a single proof mass measures in-plane acceleration (e.g., either along an x-axis or a y-axis), out-of-plane acceleration (e.g., normal to an x-y plane), and tilt of a fixed portion of a MEMS layer (e.g., normal to the x-y plane). In response to a tilt measurement, the dual-axis accelerometer compensates any offset (e.g., variability) of the out-of-plane accelerometer in order to maintain offset stability. In some embodiments, multiple dual axis accelerometers, perpendicularly configured, may be implemented via processing circuitry to offer three axis sensitivity capability.

Abstract: A MEMS sensor may include multiple sense electrodes located relative to respective portions of one or more proof masses of a MEMS layer of the sensor. Individual sense electrodes are capable of individual calibration within the drive and/or sense path for the sense electrode. A distance between each individual sense electrode relative to a proof mass is determined for the at-rest state of the sensor. Calibration values are determined based on these distances, and individual drive and/or sense signals associated with each sense electrode are modified to adjust for changes in distance, such as are caused by shifting, tilting, or bending of the MEMS layer or substrate.

Abstract: A MEMS accelerometer includes a proof mass that rotates about an in-plane axis in response to a linear acceleration such that a portion of the proof mass moves out of plane along an out-of-plane axis in a direction of a bump stop. When the proof mass becomes stuck to the bump stop, a signal is applied to one or more anti-stiction electrodes in a manner that moves the proof mass along a movement axis in order to release the proof mass from the bump stop.

Abstract: A MEMS sensor may include multiple sense electrodes located relative to respective portions of one or more proof masses of a MEMS layer of the sensor. Individual sense electrodes are capable of individual calibration within the drive and/or sense path for the sense electrode. A distance between each individual sense electrode relative to a proof mass is determined for the at-rest state of the sensor. Calibration values are determined based on these distances, and individual drive and/or sense signals associated with each sense electrode are modified to adjust for changes in distance, such as are caused by shifting, tilting, or bending of the MEMS layer or substrate.

Abstract: A microelectromechanical system (MEMS) accelerometer incorporates deformation sensing with a plurality of sense electrodes positioned to facilitate determining a deformation pattern (e.g., asymmetric or symmetric) of an underlying substrate layer relative to a MEMS layer. The deformation pattern of the substrate layer contributes to offset and/or sensitivity of the accelerometer, so the determination of the deformation pattern enables processing circuitry to compensate and improve offset and/or sensitivity stability. Tilt sense electrodes and/or comparison electrodes may be incorporated alongside the plurality of sense electrodes to monitor deformation of the substrate layer relative to a fixed portion of the MEMS layer.

Abstract: An actuator layer of a MEMS sensor is be fabricated to include multi-level features, such as additional sense electrodes, vertical bump stops, or weighted proof masses. A sacrificial layer is deposited on the actuator layer such that locations are provided for the multi-level features to extend vertically from the actuator layer. After the multi-layer features are fabricated on the actuator layer the sacrificial layer is removed. Additional processing such as patterning of the actuator layer may be performed to provide desired functionality and electrical signals to portions of the actuator layer, including to the multi-level features.

Abstract: A dual axis accelerometer with a single proof mass measures in-plane acceleration (e.g., either along an x-axis or a y-axis), out-of-plane acceleration (e.g., normal to an x-y plane), and tilt of a fixed portion of a MEMS layer (e.g., normal to the x-y plane). In response to a tilt measurement, the dual-axis accelerometer compensates any offset (e.g., variability) of the out-of-plane accelerometer in order to maintain offset stability. In some embodiments, multiple dual axis accelerometers, perpendicularly configured, may be implemented via processing circuitry to offer three axis sensitivity capability.

Abstract: Exemplary embodiment of a tilting z-axis, out-of-plane sensing MEMS accelerometers and associated structures and configurations are described. Disclosed embodiments facilitate improved offset stabilization. Non-limiting embodiments provide exemplary MEMS structures and apparatuses characterized by one or more of having a sensing MEMS structure that is symmetric about the axis orthogonal to the springs or flexible coupling axis, a spring or flexible coupling axis that is aligned to one of the symmetry axes of the electrodes pattern, a different number of reference electrodes and sense electrodes, a reference MEMS structure having at least two symmetry axes, one which is along the axis of the springs or flexible coupling, and/or a reference structure below the spring or flexible coupling axis.

Abstract: Exemplary embodiment of a tilting z-axis, out-of-plane sensing MEMS accelerometers and associated structures and configurations are described. Disclosed embodiments facilitate improved offset stabilization. Non-limiting embodiments provide exemplary MEMS structures and apparatuses characterized by one or more of having a sensing MEMS structure that is symmetric about the axis orthogonal to the springs or flexible coupling axis, a spring or flexible coupling axis that is aligned to one of the symmetry axes of the electrodes pattern, a different number of reference electrodes and sense electrodes, a reference MEMS structure having at least two symmetry axes, one which is along the axis of the springs or flexible coupling, and/or a reference structure below the spring or flexible coupling axis.

Abstract: An exemplary sensor may include a MEMS layer anchored to a cap and a substrate by anchoring portions of the MEMS layer. A suspended spring-mass system may include springs, at least one rigid mass, and at least one movable mass. The anchoring springs may be torsionally compliant about one or more axes and coupled to the rigid mass such that forces imparted by the anchoring portions are not transmitted to the movable mass.

Abstract: An exemplary sensor may include a MEMS layer anchored to a cap and a substrate by anchoring portions of the MEMS layer. A suspended spring-mass system may include springs, at least one rigid mass, and at least one movable mass. The anchoring springs may be torsionally compliant about one or more axes and coupled to the rigid mass such that forces imparted by the anchoring portions are not transmitted to the movable mass.

Abstract: The invention relates to an electric connector for use in vehicles. The connector comprises a first connector body having a first housing, a first opening, and a first projecting portion and a second connector body having a second housing, a second opening, and a second projecting portion. Pluralities of contacts have indented portions such that when the contacts are correctly inserted into the first and second housings, the indented portions correspond with the first and second openings. As a result, when the second connector body is received in the first connector body the first projecting portion is received in the second opening and the second projecting portion is received in the first opening to reciprocally couple the first and second connector bodies.

Abstract: An electric connector for a steering wheel of a vehicle, comprising a connector body having an electric connector. An attachment body having resilient retainer arms for holding the connector body in a pre-assembled position and for engaging the connector body in a final assembly position on the steering wheel, and a complementary connector having an electric contact that couples with the electric connector of the connector body.

Abstract: An electric connector for a steering wheel of a vehicle, comprising a connector body having an electric connector. An attachment body having resilient retainer arms for holding the connector body in a pre-assembled position and for engaging the connector body in a final assembly position on the steering wheel, and a complementary connector having an electric contact that couples with the electric connector of the connector body.

Abstract: The invention relates to an electric connector for use in vehicles. The connector comprises a first connector body having a first housing, a first opening, and a first projecting portion and a second connector body having a second housing, a second opening, and a second projecting portion. Pluralities of contacts have indented portions such that when the contacts are correctly inserted into the first and second housings, the indented portions correspond with the first and second openings. As a result, when the second connector body is received in the first connector body the first projecting portion is received in the second opening and the second projecting portion is received in the first opening to reciprocally couple the first and second connector bodies.