Abstract: The piezoresistive or capacitive flat pressure sensor (130) comprises a flexible flat membrane (100) made of ceramic material and a relative rigid flat support (110) made of ceramic material, wherein the support (110) has a first main face (220) and a second main face (230), and the membrane (100) has a first main face (200) and a second main face (210), and wherein the first main face (200) of the membrane (100) faces the second main face (230) of the support (110), the first main face (200) of the membrane (100) comprising at least one first electrical circuit (501), the first main face (220) of the support (110) comprising at least one second electrical circuit (502), on the perimeter of the rigid support (110) of the pressure sensor (130) an electrical connection being further provided between the first electrical circuit (501) of the first main face (200) of the membrane (100) and the second electrical circuit (502) of the first main face (220) of the support (110).

Abstract: The piezoresistive pressure sensor (1) comprises a rigid flat support (2), a flat flexible membrane (3) having a flat external face (4) exposed to a pressure of a fluid and a flat internal face (5) delimiting in cooperation with a flat internal face (7) of the support (2) a chamber (9) accommodating the deformation of the membrane (3), an electrical measuring circuit comprising a resistive Wheatstone bridge (10) applied on the flat internal face (5) of the membrane (3) for detecting the deformation of the membrane (3), and at least an electrical resistor (Rc) for calibrating the value of the output signal when the fluid is at a reference pressure, the calibration resistor (Rc) being applied on the flat internal face (5) of the membrane (3).

Abstract: The piezoresistive pressure sensor (1) comprises a rigid flat support (2), a flat flexible membrane (3) having a flat external face (4) exposed to a pressure of a fluid and a flat internal face (5) delimiting in cooperation with a flat internal face (7) of the support (2) a chamber (9) accommodating the deformation of the membrane (3), an electrical measuring circuit comprising a resistive Wheatstone bridge (10) applied on the flat internal face (5) of the membrane (3) for detecting the deformation of the membrane (3), and at least an electrical resistor (Rc) for calibrating the value of the output signal when the fluid is at a reference pressure, the calibration resistor (Rc) being applied on the flat internal face (5) of the membrane (3).

Abstract: A method for production of a pressure sensor including a flat flexible membrane made of a ceramic material and a flat rigid support thereof made of a ceramic material is provided. Steps include: —establishing an electric circuit on the membrane; —establishing an electric contact with the outside on the support; —depositing an electrically conductive material on the support; —establishing an electrical and mechanical coupling between the membrane and the support. The electrical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of an electrically conductive sinterable electrical connection material. The mechanical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material.

Abstract: A method for production of a pressure sensor including a flat flexible membrane made of a ceramic material and a flat rigid support thereof made of a ceramic material is provided. Steps include: —establishing an electric circuit on the membrane; —establishing an electric contact with the outside on the support; —depositing an electrically conductive material on the support; —establishing an electrical and mechanical coupling between the membrane and the support. The electrical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of an electrically conductive sinterable electrical connection material. The mechanical coupling between the membrane and the support are performed by deposition and sintering of at least one layer of sinterable mechanical connection material that is electrically insulating and/or isolated from the layer of sinterable electrical connection material.