Abstract: A force/torque sensor includes an outer body structure, an inner body structure, and three sensor structure extending between the outer structure and the inner structure. Overload structures are positioned between the sensor structures. An overload structure includes an outer portion that has a plurality of outer facets, and an inner portion that has a plurality of corresponding opposing inner facets. The outer facets and the inner facets are configured to permit a limited predetermined amount of relative motion between the inner body structure and the outer body structure in at least six degrees of freedom from a neutral position, and to inhibit relative motion between the inner body structure and the outer body structure beyond the predetermined amount. An overload structure may be formed by separating a bridge using wire-cut electrical discharge machining, optionally performed in a single pass.