Patents by Inventor Robertus Mathijs Gerardus Rijs
Robertus Mathijs Gerardus Rijs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10545414Abstract: The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.Type: GrantFiled: October 26, 2016Date of Patent: January 28, 2020Assignee: ASML Netherlands B.V.Inventors: Alexander Petrus Josephus Van Lankvelt, Ingmar August Kerp, Richardus Simon Antonius Oostveen, Marco Hendrikus Hermanus Oude Nijhuis, Robertus Mathijs Gerardus Rijs, Olav Johannes Seijger, Alexander Maurice Steenhoek
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Patent number: 10191396Abstract: A temperature conditioning system for a lithographic apparatus. Temperature variations in an object cause object deformation which prevents the object being accurately positioned. Temperature condition systems use conduit systems, provided with fluid, in or on the object to control the temperature of the object to reduce object deformation. In this way, parts of the object can be more accurately positioned. However, acceleration of the object and the temperature conditioning system induces variation in pressure within the fluid inside the conduit system on or in the object, which may also cause object deformation. To provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on measurements indicating pressure variation in the conduit.Type: GrantFiled: May 21, 2015Date of Patent: January 29, 2019Assignee: ASML Netherlands B.V.Inventors: Paul Corné Henri De Wit, Stijn Willem Boere, Youssef Karel Maria De Vos, Peter Paul Hempenius, Nicolaas Rudolf Kemper, Robertus Mathijs Gerardus Rijs, Frits Van Der Meulen
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Patent number: 10114299Abstract: A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the compartment and a perforated plate (101), having a plurality of through-holes (102), between the chamber and the compartment.Type: GrantFiled: May 7, 2015Date of Patent: October 30, 2018Assignee: ASML Netherlands B.V.Inventors: Günes Nakiboglu, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers, Robertus Mathijs Gerardus Rijs, Frank Johannes Jacobus Van Boxtel, Erwin Antonius Henricus Franciscus Van Den Boogaert, Marc Wilhelmus Maria Van Der Wijst, Martinus Van Duijnhoven, Jessica Henrica Anna Verdonschot, Hendrikus Herman Marie Cox
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Publication number: 20180299783Abstract: The invention relates to a vibration isolation system (VIS) comprising:—a base (10);—a coupling element (20) to be coupled to a vibration sensitive object;—a vibration isolator (30-34) arranged between the base and the coupling element;—a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and—one or more separate damping elements to act on convolutions of the bellow,Type: ApplicationFiled: October 26, 2016Publication date: October 18, 2018Applicant: ASML Netherlands B.V.Inventors: Alexander Petrus Josephus VAN LANKVELT, Ingmar August KERP, Richardus Simon Antonius OOSTVEEN, Marco Hendrikus Hermanus OUDE NIJHUIS, Robertus Mathijs Gerardus RIJS, Olav Johannes SEIJGER, Alexander Maurice STEENHOEK
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Publication number: 20180149986Abstract: A temperature conditioning system for a lithographic apparatus. Temperature variations in an object cause object deformation which prevents the object being accurately positioned. Temperature condition systems use conduit systems, provided with fluid, in or on the object to control the temperature of the object to reduce object deformation. In this way, parts of the object can be more accurately positioned. However, acceleration of the object and the temperature conditioning system induces variation in pressure within the fluid inside the conduit system on or in the object, which may also cause object deformation. To provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on measurements indicating pressure variation in the conduit.Type: ApplicationFiled: May 21, 2015Publication date: May 31, 2018Applicant: ASML NETHERLANDS B.V.Inventors: Paul Corné Henri DE WIT, Stijn Willem BOERE, Youssef Karel Maria DE VOS, Peter Paul HEMPENIUS, Nicolaas Rudolf KEMPER, Robertus Mathijs Gerardus RIJS, Frits VAN DER MEULEN
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Patent number: 9946172Abstract: A lithographic apparatus includes: an object that is moveable in at least one direction; a control system to move the object in the at least one direction, wherein the control system is arranged to control movement of the object in the at least one direction in a frequency range of interest; and a conduit provided with a fluid, wherein the conduit is arranged on or in the object in a pattern, and wherein the pattern is such that an acceleration of the object in the at least one direction causes an acceleration pressure profile in the fluid along the conduit, the acceleration pressure profile not matching with a resonance pressure profile that corresponds to a standing wave mode in the fluid with a resonance frequency in the frequency range of interest.Type: GrantFiled: November 14, 2014Date of Patent: April 17, 2018Assignee: ASML NETHERLANDS B.V.Inventors: Peter Paul Hempenius, Martijn Houben, Nicolaas Rudolf Kemper, Robertus Mathijs Gerardus Rijs, Paul Corné Henri De Wit, Stijn Willem Boere, Youssef Karel Maria De Vos, Frits Van Der Meulen
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Patent number: 9726985Abstract: A movable stage system is configured to support an object subjected to a lithography process. A short stroke part (SS) is configured to support the object (W) and a long stroke part (LS) is configured to support the short stroke part. The short stroke part is movable over a relative small range of movement with respect to the long stroke part. The long stroke part is movable over a relative large range of movement with respect to a base support arranged to support the long stroke part. A shielding element (SE) is arranged between the short and long stroke parts. A position control system (PCS) maintains a substantially constant distance between the shielding element and the short stroke part.Type: GrantFiled: January 25, 2013Date of Patent: August 8, 2017Assignees: ASML Netherland B.V., Koninklijke Philips Electronics N.V.Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout
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Publication number: 20170090296Abstract: A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the compartment and a perforated plate (101), having a plurality of Cthrough-holes (102), between the chamber and the compartment.Type: ApplicationFiled: May 7, 2015Publication date: March 30, 2017Applicant: ASML Netherlands B.V.Inventors: Günes NAKIBOGLU, Mark Constant Johannes BAGGEN, Gerard Johannes BOOGAARD, Nicolaas Rudolf KEMPER, Sander KERSSEMAKERS, Robertus Mathijs Gerardus RIJS, Frank Johannes Jacobus VAN BOXTEL, Erwin Antonius Henricus Franciscus VAN DEN BOOGAERT, Marc Wilhelmus Maria VAN DER WIJST, Martinus VAN DUIJNHOVEN, Jessica Henrica Anna VERDONSCHOT, Hendrikus Herman Marie COX
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Publication number: 20160377996Abstract: A lithographic apparatus includes: an object that is moveable in at least one direction; a control system to move the object in the at least one direction, wherein the control system is arranged to control movement of the object in the at least one direction in a frequency range of interest; and a conduit provided with a fluid, wherein the conduit is arranged on or in the object in a pattern, and wherein the pattern is such that an acceleration of the object in the at least one direction causes an acceleration pressure profile in the fluid along the conduit, the acceleration pressure profile not matching with a resonance pressure profile that corresponds to a standing wave mode in the fluid with a resonance frequency in the frequency range of interest.Type: ApplicationFiled: November 14, 2014Publication date: December 29, 2016Applicant: ASML Netherlands B.V.Inventors: Peter Paul HEMPENIUS, Martijn HOUBEN, Nicolaas Rudolf KEMPER, Robertus Mathijs Gerardus RIJS, Paul Corné Henri DE WIT, Stijn Willem BOERE, Youssef Karel Maria DE VOS, Frits VAN DER MEULEN
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Patent number: 9192271Abstract: The invention relates to a suction unit and relates to a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit over a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit in operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the under pressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least be reduced.Type: GrantFiled: August 18, 2008Date of Patent: November 24, 2015Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Jeroen Dekkers, Theo Anjes Maria Ruijl, Silvester Matheus Reijnders, Jan Van Eijk, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam, Robertus Mathijs Gerardus Rijs
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Publication number: 20140375975Abstract: A movable stage system is configured to support an object subjected to a lithography process. A short stroke part (SS) is configured to support the object (W) and a long stroke part (LS) is configured to support the short stroke part. The short stroke part is movable over a relative small range of movement with respect to the long stroke part. The long stroke part is movable over a relative large range of movement with respect to a base support arranged to support the long stroke part. A shielding element (SE) is arranged between the short and long stroke parts. A position control system (PCS) maintains a substantially constant distance between the shielding element and the short stroke part.Type: ApplicationFiled: January 25, 2013Publication date: December 25, 2014Applicants: ASML Netherlands B.V., Koninklijke Philips Electronics N.V.Inventors: Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout
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Patent number: 8915340Abstract: Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) relative to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5,z6; z3,z4) between the reference mass (22) and the first object (2) and is provided to a controller (6) to actuate the actuator (8).Type: GrantFiled: December 8, 2011Date of Patent: December 23, 2014Assignee: Koninklijke Philips N.V.Inventors: Michael Johannes Vervoordeldonk, Theo Anges Maria Ruijl, Robertus Mathijs Gerardus Rijs, Johannes Cornelius Antonius Muller
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Patent number: 8458854Abstract: A device (1) comprises at least a body (2) and a bumper (6) which is movably attached to the body so as to protect the body from shock caused by collision with an obstacle during movement of the device across a surface. The bumper is attached to the body by means of at least one spring (9) extending in a direction which is at least substantially perpendicular to the direction into which the bumper is movable with respect to the body. Furthermore, a robot cleaner comprising such a device is provided.Type: GrantFiled: January 23, 2009Date of Patent: June 11, 2013Assignee: Koninklijke Philips Electronics N.V.Inventors: Ronald Maarten Schneider, Jan Willem Bruggers, Robertus Mathijs Gerardus Rijs, Jeroen Dekkers
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Publication number: 20120074627Abstract: Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) relative to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5,z6; z3,z4) between the reference mass (22) and the first object (2) and is provided to a controller (6) to actuate the actuator (8).Type: ApplicationFiled: December 8, 2011Publication date: March 29, 2012Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Michael Johannes Vervoordeldonk, Theo Anges Maria Ruijl, Robertus Mathijs Gerardus Rijs, Johannes Corenlius Antonius Muller
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Patent number: 8091694Abstract: Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) and to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5, z6; z3, z4) between the reference mass (22) and the first object (2) and is applied to a controller (6) to actuate the actuator (8).Type: GrantFiled: August 17, 2004Date of Patent: January 10, 2012Assignee: Koninklijke Philips Electronics N.V.Inventors: Michael Johannes Vervoordeldonk, Theo Anjes Maria Ruijl, Robertus Mathijs Gerardus Rijs, Johannes Cornelius Antonius Muller
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Publication number: 20110239397Abstract: The invention relates to a suction unit and a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit on a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated, which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit during operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the underpressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least reduced.Type: ApplicationFiled: August 18, 2008Publication date: October 6, 2011Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Jeroen Dekkers, Theo Anjes Maria Ruijl, Silvester Matheus Reijnders, Jan Van Eijk, Hubert Gerard Jean Joseph Amaury Vroomen, Thomas Petrus Hendricus Warmerdam, Robertus Mathijs Gerardus Rijs
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Publication number: 20100306932Abstract: A device (1) comprises at least a body (2) and a bumper (6) which is movably attached to the body so as to protect the body from shock caused by collision with an obstacle during movement of the device across a surface. The bumper is attached to the body by means of at least one spring (9) extending in a direction which is at least substantially perpendicular to the direction into which the bumper is movable with respect to the body. Furthermore,a robot cleaner comprising such a device is provided.Type: ApplicationFiled: January 23, 2009Publication date: December 9, 2010Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V.Inventors: Ronald Maarten Schneider, Jan Willem Bruggers, Robertus Mathijs Gerardus Rijs, Jeroen Dekkers