Patents by Inventor Robertus Nicodemus Van Ballegoij

Robertus Nicodemus Van Ballegoij has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20050190351
    Abstract: A lithographic projection apparatus in which a reaction force is generated between a balance mass and a substrate table. The balance mass is elastically coupled to the base frame with a suspension eigenfrequency of between 0.3 and 10 Hz.
    Type: Application
    Filed: May 2, 2005
    Publication date: September 1, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Henrikus Cox, Robertus Nicodemus Van Ballegoij, Petrus Matthijs Vosters, Sven Antoin Hol, Sebastiaan Maria Cornelissen