Patents by Inventor Robin Enholm

Robin Enholm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for processing surface of substrate and nozzle head
    Patent number: 9683291
    Abstract: The invention relates to an apparatus and nozzle head for processing a surface of a substrate. The apparatus includes a substrate support mechanism for supporting the substrate on a substrate support plane in a process zone, a nozzle head for subjecting the surface of the substrate to successive surface reactions of at least a first precursor and a second precursor and a nozzle head support mechanism for supporting the nozzle head at a predetermined distance from the substrate support plane. The nozzle head support mechanism includes a nozzle head support surface and, that the nozzle head is supported to the nozzle head support surface.
    Type: Grant
    Filed: June 24, 2013
    Date of Patent: June 20, 2017
    Assignee: BENEQ OY
    Inventors: Robin Enholm, Leif Keto, Pekka Soininen
  • APPARATUS FOR PROCESSING SURFACE OF SUBSTRATE AND NOZZLE HEAD
    Publication number: 20150152552
    Abstract: The invention relates to an apparatus and nozzle head for processing a surface of a substrate. The apparatus includes a substrate support mechanism for supporting the substrate on a substrate support plane in a process zone, a nozzle head for subjecting the surface of the substrate to successive surface reactions of at least a first precursor and a second precursor and a nozzle head support mechanism for supporting the nozzle head at a predetermined distance from the substrate support plane. The nozzle head support mechanism includes a nozzle head support surface and, that the nozzle head is supported to the nozzle head support surface.
    Type: Application
    Filed: June 24, 2013
    Publication date: June 4, 2015
    Inventors: Robin Enholm, Leif Keto, Pekka Soininen