Patents by Inventor Robin L. Gilchrist

Robin L. Gilchrist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to remove fluorine residues from bond pads
    Patent number: 5380401
    Abstract: The process of the present invention comprises the addition of an adequate amount of argon gas in a dry etch system to clear bond pads of residual contaminants which form an undesired oxide coating on the bond pads. Carbon dioxide may be used as a carrier gas along with the argon gas. The process of the present invention preferably takes place in situ, following the silicon nitride pad etch in which fluorine-containing chemicals are used to form the bond pads.
    Type: Grant
    Filed: January 14, 1993
    Date of Patent: January 10, 1995
    Assignee: Micron Technology, Inc.
    Inventors: Curtis S. Jones, William J. Crane, Robin L. Gilchrist, Rod C. Langley