Patents by Inventor Robin Schild

Robin Schild has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for processing substrates in a fluid tank
    Patent number: 6145520
    Abstract: An apparatus for the processing of substrates in a fluid tank is provided. The fluid tank has at least one fluid inlet opening and at least one overflow opening in the upper region of at least one side wall of the fluid tank. Optimum adaptation to fluid circulation rates is provided by at least one slide having a variable position relative to the overflow opening for varying the opening area thereof. This opening area is smaller during introduction of gas than during a preceding rinsing process.
    Type: Grant
    Filed: October 23, 1998
    Date of Patent: November 14, 2000
    Assignee: Steag Microtech GmbH
    Inventor: Robin Schild
  • Method and device for chemically treating substrates
    Patent number: 5569330
    Abstract: A method for treating substrates includes chemically treating at least one substrate in a container with at least one treatment fluid and washing said at least one substrate with a washing fluid in the same container. Subsequently, the at least one substrate is dried.
    Type: Grant
    Filed: January 13, 1995
    Date of Patent: October 29, 1996
    Assignee: Steag MicroTech GmbH Donaueschingen
    Inventors: Robin Schild, Milan Kozak, Johann Durst