Abstract: A method produces a structured element by machining a workpiece with pulsed laser radiation, the workpiece including a workpiece material transparent to the laser radiation, the laser radiation being radiated into the workpiece from an entry side and, in an area of a rear side of the workpiece located opposite the entry side, being focused within the workpiece in a focus area such that workpiece material is removed in the focus area by multi-photon absorption, and includes bringing the rear side of the workpiece, at least in a machining area currently being machined around the focus area, into contact with a free-flowing liquid transparent to the laser radiation, wherein at least some of the liquid flows in a direction towards the machining area such that the liquid flows into the machining area at an angle of 60° or less to the rear side.

Abstract: A method produces a structured element by material-removing machining of a workpiece with pulsed laser radiation, the workpiece consisting of a workpiece material transparent to the laser radiation, the laser radiation being radiated into the workpiece from a radiation entry side and, in an area of a rear side of the workpiece located opposite the radiation entry side, being focused within the workpiece in a focus area such that workpiece material is removed in the focus area by multi-photon absorption, and includes bringing the rear side of the workpiece, at least in a machining area currently being machined around the focus area, into contact with a free-flowing liquid transparent to the laser radiation, wherein at least some of the liquid is set to flow in a direction towards the machining area such that the liquid flows into the machining area at an acute angle of 60° or less to the rear side.