Patents by Inventor Robley V. Stuart

Robley V. Stuart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for magnetron sputtering
    Patent number: 4824540
    Abstract: Magnetron type sputtering apparatus in which the magnetic field is provided by one or more electromagnets powered by an electric current derived from sputtering ion current. The magnetron sputtering source electromagnets are wound, insulated and connected so as to provide that the sputtering ion current, or a portion thereof, passes through the coils and thus powers the electromagnets. Thus, a plurality of electromagnets can be connected in parallel or in series and powered by the sputtering ion current.
    Type: Grant
    Filed: April 21, 1988
    Date of Patent: April 25, 1989
    Inventor: Robley V. Stuart