Patents by Inventor Robyn R. Carlson

Robyn R. Carlson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Assembly and method for improved scanning electron microscope analysis of semiconductor devices
    Patent number: 6642518
    Abstract: An assembly and method for improved scanning electron microscope analysis of semiconductor devices include a structure including a first layer and a second layer, the second layer shrinking substantially when the structure is examined with a scanning electron microscope having a beam energy of at least 1.5 KeV, and at least part of the surface of the structure coated with a material composed of Iridium, wherein the coating is of sufficient thickness to reduce shrinkage of the second layer to approximately a predetermined amount when the structure is examined with a scanning electron microscope having a beam energy of at least 1.5 KeV.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: November 4, 2003
    Assignee: Texas Instruments Incorporated
    Inventors: Fred Y. Clark, James D. Krouse, Ping Jiang, Robyn R. Carlson