Patents by Inventor Roger Bradford

Roger Bradford has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing chamber having separable upper and lower halves
    Patent number: 6347919
    Abstract: A wafer processing apparatus includes a processing chamber having a top chamber portion and a bottom chamber portion, respectively. The apparatus further includes an annular ring valve associated with one of the top chamber portion and the bottom chamber portion which is operable to close the processing chamber for processing in a first position and open the processing chamber for access thereto in a second position. The ring valve, in the first position, provides a substantially uniform surface about an inner periphery of the closed processing chamber, and thereby facilitates uniform processing conditions. A method of accessing a wafer processing apparatus is also disclosed and includes moving an annular ring valve within a processing chamber between two positions.
    Type: Grant
    Filed: December 17, 1999
    Date of Patent: February 19, 2002
    Assignee: Eaton Corporation
    Inventors: Kevin Thomas Ryan, Peter Lawrence Kellerman, Frank Sinclair, Ernest Everett Allen, Roger Bradford Fish