Patents by Inventor Roger C. Callahan
Roger C. Callahan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9921242Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.Type: GrantFiled: July 5, 2016Date of Patent: March 20, 2018Assignee: OXFORD INSTRUMENTS ASYLUM RESEARCH INCInventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbauch, Jason Bemis, Jason Cleveland, Nicholas Geiss
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Publication number: 20160313369Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.Type: ApplicationFiled: July 5, 2016Publication date: October 27, 2016Inventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbauch, Jason Bemis, Jason Cleveland
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Patent number: 9383388Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.Type: GrantFiled: April 21, 2015Date of Patent: July 5, 2016Assignee: Oxford Instruments Asylum Research, IncInventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbach, Jason Bemis, Jason Cleveland
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Patent number: 9366693Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: GrantFiled: June 30, 2015Date of Patent: June 14, 2016Assignees: Oxford Instruments PLC, Oxford Instruments AFM IncInventors: Roger B Proksch, Roger C Callahan
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Publication number: 20150377920Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: June 30, 2015Publication date: December 31, 2015Inventors: Roger B. Proksch, Roger C. Callahan
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Publication number: 20150301080Abstract: Improvements for rapidly calibrating and automatically operating a scanning probe microscope are disclosed. A central component of the SPM is the force transducer, typically a consumable cantilever element. By automatically calibrating transducer characteristics along with other instrumental parameters, scanning parameters can be rapidly and easily optimized, resulting in high-throughput, repeatable and accurate measurements. In contrast to dynamic optimization schemes, this can be accomplished before the surface is contacted, avoiding tip or sample damage from the beginning of the measurement process.Type: ApplicationFiled: April 21, 2015Publication date: October 22, 2015Inventors: Roger Proksch, Roger C. Callahan, Frank Stetter, Ted Limpoco, Sophia Hohlbach, Jason Bemis, Jason Cleveland
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Publication number: 20150026846Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: July 16, 2013Publication date: January 22, 2015Applicants: OXFORD INSTRUMENTS AFM INC., OXFORD INSTRUMENTS PLCInventors: Roger B. Proksch, Roger C. Callahan
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Publication number: 20140041084Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.Type: ApplicationFiled: October 13, 2013Publication date: February 6, 2014Applicants: Oxford Instruments AFM, Inc, Oxford Instruments PLCInventors: Roger Proksch, Roger C. Callahan
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Patent number: 8555711Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.Type: GrantFiled: September 23, 2011Date of Patent: October 15, 2013Assignee: Asylum Research CorporationInventors: Roger Proksch, Roger C. Callahan
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Patent number: 8489356Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: GrantFiled: May 10, 2011Date of Patent: July 16, 2013Assignees: Oxford Instruments, PLC, Oxford Instruments AFM, Inc.Inventors: Roger B. Proksch, Roger C. Callahan
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Publication number: 20120079631Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.Type: ApplicationFiled: September 23, 2011Publication date: March 29, 2012Applicant: ASYLUM RESEARCH CORPORATIONInventors: Roger Proksch, Roger C. Callahan
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Patent number: 8024963Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.Type: GrantFiled: June 16, 2008Date of Patent: September 27, 2011Assignee: Asylum Research CorporationInventors: Roger Proksch, Roger C. Callahan
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Publication number: 20110219479Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: May 10, 2011Publication date: September 8, 2011Applicant: ASYLUM RESEARCH CORPORATIONInventors: Roger B. Proksch, Roger C. Callahan
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Patent number: 7941286Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: GrantFiled: November 28, 2006Date of Patent: May 10, 2011Assignee: Asylum Research CorporationInventors: Roger B. Proksch, Roger C. Callahan
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Publication number: 20090013770Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.Type: ApplicationFiled: June 16, 2008Publication date: January 15, 2009Inventors: Roger Proksch, Roger C. Callahan
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Publication number: 20070176101Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.Type: ApplicationFiled: November 28, 2006Publication date: August 2, 2007Inventors: Roger B. Proksch, Roger C. Callahan