Abstract: An apparatus and method for aligning an automated semiconductor wafer handling device with a semiconductor wafer receiving device. An alignment head is attached to the semiconductor wafer handling device in place of a wafer gripper assembly. The alignment head has at least one dial indicator disposed thereon. The ends of the dial indicators are arranged such that they are located in the same position a semiconductor wafer would occupy during normal operation of the automated semiconductor wafer handling device. As the automated semiconductor wafer handling device is activated, the alignment head is brought within close proximity to the semiconductor wafer receiving device. In so doing, the ends of the dial pins contact the surface of the semiconductor wafer receiving device thereby indicating the relative position and alignment of the automated semiconductor wafer handling device with respect to the semiconductor wafer receiving device.

Abstract: Using systems and methods wherein the diffuser element can be removed independently of upper electrode assembly removal, maintenance time associated with diffuser plate cleaning can be substantially reduced (e.g., several hours per week of operation). Because a diffuser element should typically be cleaned at least 3-4 times more frequently than the upper electrode assembly, maintenance costs over the course of an annual operating period can therefore be reduced significantly. Further, use of a diffuser element which can be independently removed permits portions of an upper electrode assembly to be frequently cleaned in place, thus further enhancing operability of the etching system without increasing operating costs.

Abstract: An adjustable exercise apparatus of the present invention includes a vertically-oriented frame having an operable cable threaded therethrough connecting a pull bar to a plurality of weights. The cable is directed over pulleys so that a person pulling on the pull bar will lift the weights against the force of gravity. A pair of curved guide rails extend upwardly and forwardly from the forward end of the frame with the center of the arch of the guide rails located generally above the seat upon which the person will sit to operate the apparatus. A carriage is mounted on the guide rails and is designed to guide the cable from the weights to the pull bar. The carriage may be selectively positioned at a plurality of points along the guide rails from the forward upper end to the rearward lower end. A spring-actuated pin cooperable with a plurality of apertures in one of the guide rails to maintain the carriage in a predetermined position.