Abstract: A method (40) of determining a best focus for an integrated circuit stepper (10). The method repeats various steps for a plurality of different focus levels. The repeated steps include forming a first element group (C1) on a wafer (30F1), where the first element group comprises one or more elements and each of the one or more elements in the first element group has a shape. The repeated steps further include defining a first reference point (CC1) for the first element group at a position relative to the shape of the one or more elements in the first element group. Similarly, the repeated steps include forming a second element group (C2) on the wafer, where the second group comprises one or more elements and each of the one or more elements in the second element group has a shape, and defining a second reference point (CC2) for the second element group at a position relative to the shape of the one or more elements in the second element group.

Abstract: A method and system of measuring misalignment between two levels wherein there is provided a first grating pattern (19, 21, 23, 25, 3, 5, 7, 9) on a first layer (1) and a second grating pattern (19′, 21′, 23′, 25′, 3′, 5′, 7′, 9′) on a second layer (41) capable of providing Moire fringes when disposed over the first grating pattern and which is disposed over the first grating pattern whereby the first and second grating patterns are capable of providing Moire fringes. Misalignment of the first layer relative to the second layer is measured from the position of the Moire fringe provided by the first and second grating patterns either visually or by optical instrumentation. The second layer is preferably transparent.

Abstract: A dynamic fuse testing device includes an elongated handle, a head pivotally mounted to the handle, a fastener for tightening the head relative to the handle to place the head and handle at a desired angular position relative to one another, a pair of elongated electrically conductive test probes for contacting opposite ends of a fuse, a pair of mounting members attached in spaced relation to one another on the head, the mounting members having respective outer ends mounting the respective probes, one of the mounting members being stationarily mounted on the head and the other of the mounting member being rotatably mounted on the head such that its outer end is pivotally movable toward and away from the outer end of the one mounting member for adjusting the distance between the probes to accommodate fuses of different sizes, and a lamp and battery on the head connected in series with the probes such that the lamp is illuminated by contact of the probes with a properly functioning fuse.