Abstract: A ring seal for sealing opposing flow component sealing surfaces defines a fluid flow path that is suitable for applications such as a semiconductor manufacturing modular gas delivery system. The ring seal includes an annular extension in the form of a modified “delta” extending from one or both sealing surfaces of the ring seal. The modified “delta” extends to an apex or point above the ring seal's sealing surface. First and second extension surfaces extend in opposite directions from the apex back toward the ring seal's sealing surface. In one aspect, the first extension surface defines a ridge where the slope of the first extension surface changes to decline faster to the ring seal's sealing surface. In another aspect, the apex is located within the annular extension closer to the axial hole than to an outer radial diameter of the annular seal body.

Abstract: A ring seal for sealing opposing flow component sealing surfaces defines a fluid flow path that is suitable for applications such as a semiconductor manufacturing modular gas delivery system. The ring seal includes an annular extension in the form of a modified “delta” extending from one or both sealing surfaces of the ring seal. The modified “delta” extends to an apex or point above the ring seal's sealing surface. First and second extension surfaces extend in opposite directions from the apex back toward the ring seal's sealing surface. In one aspect, the first extension surface defines a ridge where the slope of the first extension surface changes to decline faster to the ring seal's sealing surface. In another aspect, the apex is located within the annular extension closer to the axial hole than to an outer radial diameter of the annular seal body.